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首页> 外文会议>2010 IEEE/ASME International Conference on Advanced Intelligent Mechatronics >Segment-structured diamond-like carbon films for friction surface of surface acoustic wave linear motor
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Segment-structured diamond-like carbon films for friction surface of surface acoustic wave linear motor

机译：声表面波线性电动机摩擦表面的分段结构类金刚石碳膜

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摘要

A surface acoustic wave (SAW) linear motor is a kind of ultrasonic motor, which has many merits such as thin structure, easy installation and so on. The motor, however, has a problem with wear of contact surface due to its driving principle. Diamond-like carbon (DLC) film has been recognized as a wear resistance material. In our research, segment-structured DLC (S-DLC) films were applied to the stator transducer surface. However, exfoliations of the S-DLC films and insufficient driving performance were observed. This paper proposes a new preparing method for the segment structure on the stator transducer and describes the prepared surface. Driving surface abrasion test result and increased driving characteristics are also reported. The reason why the driving performance was improved but not same as that of a conventional SAW linear motor is discussed. Friction coefficients are focused for the discussion.
机译：声表面波（SAW）线性电动机是一种超声波电动机，具有结构薄，安装方便等优点。然而，由于其驱动原理，电动机存在接触表面磨损的问题。类金刚石碳（DLC）膜已被认为是一种耐磨材料。在我们的研究中，将段结构DLC（S-DLC）膜应用于定子换能器表面。然而，观察到S-DLC膜的剥离和不足的驱动性能。本文提出了一种新的定子换能器扇形结构的制备方法，并描述了所制备的表面。还报告了驾驶表面磨损测试结果和增强的驾驶特性。讨论了驱动性能得到改善但与传统的SAW线性电动机不同的原因。摩擦系数是讨论的重点。

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