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A sensorized /spl mu/electro discharge machined superelastic alloy microgripper for micromanipulation: simulation and characterization

机译:一种用于微操纵的传感器/ SPL MU / ELITOLTOLACH加工超弹性合金微塑料微塑性微铸造型微塑化微铸造:仿真和表征

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This paper describes a novel microgripper, fabricated in a superelastic alloy (Ni/sub 50.8/Ti/sub 49.2/) by wired micro Electro Discharge Machining (/spl mu/EDM). The main features of the new microgripper are the use of a superelastic alloy to improve flexure performance by lowering stresses induced and the /spl mu/EDM fabrication technique. The microgripper was sensorized with commercial semiconductor strain-gauges and implemented in a force-feedback micromanipulation workstation developed in the authors' laboratory. Both FEM simulations and the results of experimental characterization in position and force are presented.
机译:本文介绍了一种新型微臂,通过有线微电路电气放电加工(/ SPL MU / EDM)在超弹性合金(Ni / Sub 50.8 / Ti / Sub 49.2 /)中制造。新型微电器的主要特征是使用超弹性合金来通过降低诱导的应力和/ SPL MU / EDM制造技术来改善挠性性能。通过商业半导体应变计传感微臂,并在作者实验室中开发的力反馈微操纵工作站中实现。提出了有限元模拟和实验表征的结果和力的结果。

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