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首页> 外文会议>Conference on scanning microscopies >Does Your SEM Really Tell the Truth?-How Would You Know? Part 4: Charging and its Mitigation
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Does Your SEM Really Tell the Truth?-How Would You Know? Part 4: Charging and its Mitigation

机译：您的SEM真的是真的吗？-您怎么知道？第四部分：充电及其缓解

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This is the fourth part of a series of tutorial papers discussing various causes of measurement uncertainty in scanned particle beam instruments, and some of the solutions researched and developed at NIST and other research institutions. Scanned particle beam instruments, especially the scanning electron microscope (SEM), have gone through tremendous evolution to become indispensable tools for many and diverse scientific and industrial applications. These improvements have significantly enhanced their performance and made them far easier to operate. But, the ease of operation has also fostered operator complacency. In addition, the user-friendliness has reduced the apparent need for extensive operator training. Unfortunately, this has led to the idea that the SEM is just another expensive "digital camera" or another peripheral device connected to a computer and that all of the problems in obtaining good quality images and data have been solved. Hence, one using these instruments may be lulled into thinking that all of the potential pitfalls have been fully eliminated and believing that, everything one sees on the micrograph is always correct. But, as described in this and the earlier papers, this may not be the case. Care must always be taken when reliable quantitative data are being sought. The first paper in this series discussed some of the issues related to signal generation in the SEM, including instrument calibration, electron beam-sample interactions and the need for physics-based modeling to understand the actual image formation mechanisms to properly interpret SEM images. The second paper has discussed another major issue confronting the microscopist: specimen contamination and methods to eliminate it. The third paper discussed mechanical vibration and stage drift and some useful solutions to mitigate the problems caused by them, and here, in this the fourth contribution, the issues related to specimen "charging" and its mitigation are discussed relative to dimensional metrology.
机译：这是一系列教程论文的第四部分，讨论了扫描粒子束仪器中测量不确定性的各种原因，以及在NIST和其他研究机构研究和开发的一些解决方案。扫描粒子束仪器，尤其是扫描电子显微镜（SEM），经历了巨大的发展，已成为许多多种科学和工业应用必不可少的工具。这些改进显着提高了它们的性能，并使它们更易于操作。但是，操作的简便性也增加了操作员的自满情绪。此外，用户友好性减少了对大量操作员进行培训的明显需求。不幸的是，这导致了这样的想法，即SEM只是另一个昂贵的“数码相机”或连接到计算机的另一个外围设备，并且已经解决了获得高质量图像和数据的所有问题。因此，使用这些工具的人可能会陷入沉思，认为所有潜在的陷阱都已被完全消除，并相信人们在显微照片上看到的一切都是正确的。但是，正如本白皮书和早期论文中所述，情况可能并非如此。当寻求可靠的定量数据时，必须始终保持谨慎。本系列的第一篇论文讨论了与SEM中信号产生有关的一些问题，包括仪器校准，电子束-样品相互作用以及基于物理的建模的必要性，以了解正确解释SEM图像的实际图像形成机制。第二篇论文讨论了显微学家面临的另一个主要问题：标本污染及其消除方法。第三篇论文讨论了机械振动和位移台，以及减轻它们引起的问题的一些有用的解决方案。在本文的第四篇文章中，相对于尺寸计量学，讨论了与样品“充电”及其缓解有关的问题。

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