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首页> 外文会议>IEEE Transportation Electrification Conference and Expo, Asia-Pacific >A novel fully-decoupled dual-mass silicon micromachined gyroscope
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A novel fully-decoupled dual-mass silicon micromachined gyroscope

机译：一种新颖的全解耦双质量硅微机械陀螺仪

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摘要

A novel fully-decoupled dual-mass silicon micro-machined Gyroscope is presented in this paper to reduce the coupling between the drive mode and sense mode for high performance. The theoretical analysis was made based on the simplified kinematics model. Then, the configuration of the dual-mass double-linear vibratory gyroscope, a three-frame structure, was given. The numerical simulation was made, which shows the decoupling effect of the design. Finally, tests were done on the fabricated prototype. The bias instability is 3.02¿¿/h and the nonlinearity of scale factor is less than 50ppm, which prove that this gyroscope has exhibited good mode-decoupling effect and good performance.
机译：本文提出了一种新型的完全解耦的双质量硅微机械陀螺仪，以减少驱动模式和感测模式之间的耦合，从而实现高性能。基于简化的运动学模型进行了理论分析。然后，给出了双质量双线性振动陀螺仪的三框架结构。进行了数值模拟，显示了设计的去耦效果。最后，对装配好的原型进行了测试。偏置不稳定性为3.02μ/ h，比例因子的非线性度小于50ppm，证明该陀螺仪具有良好的模式解耦效果和良好的性能。

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