The process of signal flow at vias in multilayer interconnectionsis discussed as a general phenomenon involving partial conversion ofsignal-line waveguide mode energy into parallel-plate waveguide modeenergy. This partial conversion of linearly propagating mode into acylindrically propagating parallel-plate waveguide mode at vias isdiscussed and illustrated with the graphic results of a 3D, full-wavepropagation analysis. Based on these observations, equivalent circuitsof vias which incorporate the mode conversion phenomenon are proposed.The effectiveness of the proposed model is demonstrated as a comparisonbetween the 3D, full-wave simulation and SPICE circuit simulation
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