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首页> 外文会议>IEEE Ultrasonics Symposium >Fundamental Study on Array Type Medical Ultrasound Probe with Hydrothermally Synthesized PZT Poly-Crystalline Film - Fabrication and Performance Estimation of Miniature 1-Dimensional Array Type Ultrasound Probe
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Fundamental Study on Array Type Medical Ultrasound Probe with Hydrothermally Synthesized PZT Poly-Crystalline Film - Fabrication and Performance Estimation of Miniature 1-Dimensional Array Type Ultrasound Probe

机译：阵列型医用超声探头与水热合成的PZT多晶硅膜 - 制造及性能估计微型1维阵列超声探头的基础研究

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摘要

In this study, in order to apply the hydrothermally synthesized piezoelectric polycrystalline films to the medical miniature 1-dimensional array type ultrasound probes with resonance frequency of 10 MHz, the hydroxyapatite was employed as the material for the substrate. After sputtering of pure titanium on the surface of hydroxyapatite substrate, the titanium film was etched using photo-etching method to form 1-dimensional titanium film electrodes array with element pitch of 75 (mu)m, element width of 40 (mu)m and element length of 4mm in order to scan ultrasound beam electronically by sector scan mode using phased array technique. We tried to deposit PZT poly-crystalline film hydrothermally on the titanium film electrodes. The deposited PZT poly-crystalline film has thickness of about 10 (mu)m on the 1-dimensional array titanium electrode pattern. We could succeed trial fabrication of the miniature 1-dimensional array type ultrasound probe. The sputtered and etched titanium film electrodes were used as the electrodes for signal lines of the 1-dimensional array type ultrasound probe. Furthermore, a gold electrode was deposited as a common ground electrode all over the surface of 1-dimensional hydrothermally synthesized PZT poly-crystalline film vibrators. Transmitted ultrasound pulse from 10 MHz commercial ultrasound probe was received by the trially fabricated 1-dimensional array type ultrasound probe with hydrothermally synthesized PZT poly-crystalline film vibrators.
机译：在该研究中，为了将水热合成的压电多晶膜施加到医用微型1维阵列型超声探针，其共振频率为10MHz，羟基磷灰石用作基材的材料。在羟基磷灰石底物表面上溅射纯钛后，使用光蚀刻方法蚀刻钛膜，以形成1维钛膜电极阵列，元件间距为75（mu）m，元件宽度为40（mu）m和元素长度为4mm，以便使用相控阵技术通过扇区扫描模式以电子方式扫描超声波束。我们试图在钛膜电极上水热沉积PZT聚结晶膜。沉积的PZT聚结晶膜在1维阵列钛电极图案上具有约10（mu）m的厚度。我们可以成功制造微型1维阵列型超声探头。溅射和蚀刻的钛膜电极用作1维阵列型超声探头的信号线的电极。此外，在1维水热合成的PZT聚结晶膜振动器的表面上沉积金电极作为公共接地电极。通过透过10MHz商业超声探针的透射超声脉冲由三维阵列型超声探头接收，具有水热合成的PZT多晶硅膜振动器。

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