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Strained-layer InGaAs-GaAs-AlGaAs buried heterostructure lasers by three-step selective-area metalorganic chemical vapor deposition

机译:应变层Ingaas-GaAs-Algaas通过三步选择性区域金属化学气相沉积掩埋异质结构激光器

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In this talk, we present the fabrication process and laser results for narrow stripe, index-guided strained layer lasers with low threshold currents and good spectral characteristics. Threshold currents as low as 11 mA for uncoated devices and single longitudinal mode operation are obtained for the three step growth buried heterostructure laser, indicating high quality device performance for devices fabricated with an AlGaAs regrowth step.
机译:在这次谈话中,我们介绍了具有低阈值电流和良好光谱特性的窄条纹,指导引导的应变层激光器的制造过程和激光结果。对于未涂覆器件的阈值电流,对于未涂覆的装置,并且为三步生长掩埋异质结构激光获得单个纵向模式操作,表明用ALGAAS再生步骤制造的装置的高质量器件性能。

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