THERMAL PLASMA SYNTHESIS OF Si-C-N COMPOSITE POWDERS, INFLUENCE F PRECURSOR AND PROCESSING

机译：热血浆合成Si-C-N复合粉末，影响F前体和加工

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Nanoscale Si-C-N composite powders (mean particle size less than 100 nm) were synthesized by a r.f. induction plasma torch. Reactions of S (CH_3)_4 and NH_3 as well as SiH_4, C_2H_4, and NH_3 were studied. The chemical composition as well as the morphology of nanoscale Si-Cn-N composites can be controlled by both processing and precursors, but the influence of processing is stronger. Crystalline phase is mainly b-Sic, but sometimes, a change of the lattice constant suggests a nisults in nanostructured powders, containing b-SiC as well as a-Si_3N_4 and sometimes -Si_3N_4.

机译：纳米级Si-C-N复合粉末（平均粒径小于100nm）由R.F合成。感应等离子体火炬。研究了S（CH_3）_4和NH_3以及SIH_4，C_2H_4和NH_3的反应。化学组成以及纳米级Si-CN-N复合材料的形态可以通过加工和前体来控制，但加工的影响更强。结晶相主要是B-SiC，但有时，晶格常数的变化表明纳米结构粉末中的Nisults，含有B-SiC以及A-Si_3N_4，有时-Si_3N_4。

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《International symposium on plasma chemistry》|1997年||共6页
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R. Mach; H.-D. Klotz; C. Olschewski; R. Mohr;
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中图分类等离子体化学;
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THERMAL PLASMA SYNTHESIS OF Si-C-N COMPOSITE POWDERS, INFLUENCE F PRECURSOR AND PROCESSING

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