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首页> 外文会议>Society of Photo-Optical Instrumentation Engineers Conference on Interferometry : Techniques and Analysis >Compensation for Phase Change on Reflection in White-Light Scanning Interferometry
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Compensation for Phase Change on Reflection in White-Light Scanning Interferometry

机译：白光扫描干涉法反射相变的补偿

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摘要

White-light scanning interferometry uses a wide-band spectrum light source and observes the short coherent variation of interferometric intensity obtained while moving either the test surface or the reference surface along the optical axis of the interferometric optics. When one employs the scanning interferometry for gauging the step height between two separate surface points that are made of different materials, a significant amount of measurement error occurs due to the phase change on reflection. The phase change varies with wavelength and materials, so its effects on resulting interferograms are not easy to be precisely identified. In this paper, we present a practical method for compensating for the measurement error caused by the phase change on reflection in step height gauging. The method takes a first-order approximation to the wavelength-dependent nonlinear behavior of the phase change and then determines its precise value from the phase information of the Fourier-transformed intensity data in the spatial frequency domain. The method can be realized simply by performing two additional quasi-monochromatic phase-shifting interferometric measurements, or more conveniently by adopting a special form of light source that has two spectral peaks. Experimental results prove that the propose compensation method is capable of reducing the measurement error to an accuracy of +-2 nm.
机译：白光扫描干涉测量法使用宽带谱光源，并观察在干涉光学器件的光轴移动测试表面或参考表面的同时获得的干涉强度的短相干变化。当一个人采用扫描干涉测量测量法测量由不同材料制成的两个单独的表面点之间的台阶高度时，由于反射的相位变化，发生了大量的测量误差。相变随波长和材料而变化，因此其对所产生的干涉图的影响不容易被精确地识别。在本文中，我们提出了一种用于补偿由步进高度测量中的反射反射的相位变化引起的测量误差的实用方法。该方法对相变的波长依赖性非线性行为采用一阶近似，然后从空间频域中的傅立叶变换的强度数据的相位信息确定其精确值。通过采用具有两个光谱峰的特殊形式的特殊形式，可以简单地通过执行两个额外的准单色相移干涉测量测量来实现该方法。实验结果证明，提出的补偿方法能够将测量误差降低到+ -2nm的精度。

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