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AUTOMATIC REAL-TIME GUIDANCE OF LASER MACHINING WITH INLINE COHERENT IMAGING

机译:用内联连贯成像自动实时指导激光加工

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Optical coherence imaging can measure hole depth in real-time (> 20 kHz) during laser drilling without being blinded by intense machining light or incoherent plasma emissions. Rapid measurement of etch rate and stochastic melt relaxation makes these images useful for process development and quality control in a variety of materials including metals, semiconductors and dielectrics. The ability to image through the ablation crater in materials transparent to imaging light allows the guidance of blind hole cutting even with limited a priori knowledge of the sample. Significant improvement in hole depth accuracy with the application of manual feedback from this imaging has been previously demonstrated. However, the large quantity of raw data and computing overhead are obstacles for the application of coherent imaging as a truly automatic feedback mechanism. Additionally, the high performance components of coherent imaging systems designed for its traditional application in biological imaging are costly and may be unnecessary for materials processing. In this work, we present a coherent imaging system design that costs less than a fifth of comparable commercial products. We also demonstrate streamlined image processing suited for automated feedback that increases processing speed by two orders of magnitude.
机译:光学相干成像可以在激光钻孔期间测量实时(> 20 kHz)的孔深度,而不会被强烈的加工光或非密闭等离子体排放致光。蚀刻速率和随机熔体松弛的快速测量使得这些图像可用于各种材料的过程开发和质量控制,包括金属,半导体和电介质。通过对成像光透明的材料通过消融陨石坑的能力允许盲目孔切割的引导,即使有限的样本的先验知识。先前已经证明了利用该成像的手动反馈的孔深度精度的显着改善。然而,大量的原始数据和计算开销是应用相干成像作为真正自动反馈机制的障碍。另外,设计用于其在生物成像中的传统应用的相干成像系统的高性能组件是昂贵的,并且可能是不必要的材料处理。在这项工作中,我们提出了一个连贯的成像系统设计,成本低于可比商业产品的五分之一。我们还展示了适用于自动反馈的简化图像处理,从而增加了两个数量级的处理速度。

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