In this work we investigated Si field emission cathodes coated with ferroelectric material Lead Zirconate Titanate (PZT) by the sol-gel method. The arrays were coated with three different thicknesses of PZT layer using standard spinning techniques. The thickness of a single layer of PZT was measured to be 0.1μm. The electrical characteristics of the uncoated and coated silicon emitter arrays are compared and evaluated using I-V measurements in the diode configuration under a constant DC and pulsed electric field.
展开▼
