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KINETIC MODEL OF INCORPORATION OF As_4 ON GaAs (001)

机译:GaAs上AS_4掺入的动力学模型(001)

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摘要

The kinetic model, describing homoepitaxial growth on a (001)GaAs surface within the framework of the kinetic mean field equations, is offered. The following elementary surface processes are included in consideration; As_4 adsorption-desorption, As_4~* bimolecular reaction, incorporation of As_2~(chem) into lattice sites. The model gives the adequate description of the experimental results on growth rate for low and high pressures. Numerical values of elementary constants are obtained.
机译:提供了在动力学平均场方程的框架内的(001)GaAs表面上的同性记增长的动力学模型。考虑以下基本表面过程; AS_4吸附 - 解吸,AS_4〜*双分子反应,将AS_2〜(Chem)掺入晶格位置。该模型赋予实验结果对低压和高压的生长速率进行了足够的描述。获得基本常数的数值。

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