A new active vibration isolation system using zero-power magnetic suspension was developed. Since a zero-power system behaves as if it has a negative stiffness, connecting it with a normal spring in series can generate infinite stiffness against disturbances on the isolation table. In the developed system, the three dimensional motions of the isolation table in the vertical direction are actively controlled by the proposed suspension mechanism. It is confirmed experimentally that the system has high stiffness against disturbance acting on the isolation table.
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