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Time-resolved tuned diode laser absorption spectroscopy of pulsed plasma

机译：脉冲等离子体的时间分辨调谐二极管激光吸收光谱

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摘要

A novel method for time-resolved tuned diode laser absorption spectroscopy has been developed. In this paper, we describe in detail developed electronic module that controls time-resolution of laser absorption spectroscopy system. The TTL signal triggering plasma pulse is used for generation of two signals:the first one triggers the fine tuning of laser wavelength and second one controls time-defined signal sampling from absorption detector. The described method and electronic system enable us to investigate temporal evolution of sputtered particles in technological low-temperature plasma systems. The pulsed DC planar magnetron sputtering system has been used to verify this method. The 2" in diameter titanium target was sputtered in pure argon atmosphere. The working pressure was held at 2 Pa. All the experiments were carried out for pulse ON time fixed at 100 μs. When changing OFF time the discharge has operated between High Power Impulse Magnetron Sputtering regime and pulsed DC magnetron regime. The effect of duty cycle variation results in decrease of titanium atom density during ON time while length of OFF time elongates. We believe that observed effect is connected with higher degree of ionization of sputtered particles. As previously reported by Bohlmark et al., the measured optical emission spectra in HiPIMS systems were dominated by emission from titanium ions [1].
机译：已经开发了一种新的时间分辨调谐二极管激光吸收光谱的方法。在本文中，我们详细描述了一种控制激光吸收光谱系统的时间分辨率的电子模块。 TTL信号触发等离子体脉冲用于生成两个信号：第一触发激光波长的微调和第二一个触发从吸收检测器的时间定义信号采样。所描述的方法和电子系统使我们能够研究技术低温等离子体系统中溅射颗粒的时间演变。脉冲DC平面磁控溅射系统已用于验证该方法。中直径2" 钛靶是在纯氩气气氛中溅射。该工作压力在2Pa保持。所有实验都进行脉冲ON固定在100微秒的时间。当改变关闭时间的放电已经高功率脉冲之间操作磁控溅射制度和脉冲DC磁控制度。占空比变化导致的在钛原子密度的减小期间接通时间的作用而关断时间伸长的长度我们认为，观察到的效果与较高程度的溅射粒子的电离的连接。正如前面Bohlmark等人报道，Hipims系统中的测量光发射光谱通过钛离子的发射来支配[1]。

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