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Time-resolved tunable diode laser absorption spectroscopy of pulsed plasma

机译:脉冲等离子体的时间分辨可调谐二极管激光吸收光谱

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摘要

A method for time-resolved tunable diode laser absorption spectroscopy (LAS) has been developed. In this Letter, we describe in detail a developed electronic module that controls the time resolution of the LAS system. The transistor-transistor logic signal triggering the plasma pulse is used for generation of two signals: the first one triggers fine tuning of the laser wavelength and the second one controls time-defined signal sampling from the absorption detector. The described method and electronic system enable investigation of the temporal evolution of the density and temperature of selected particles in technological plasma systems. The high-power impulse magnetron sputtering system with a period of 10 ms and a duty cycle of 1% has been used to verify this method. The temporal evolution of argon metastable density was measured in the active part of the pulse and in the afterglow. The resulting density of Ar~* displays a double-peak structure with a first peak in the plasma "ON" phase and a second peak in the afterglow approximately 1 ms after the end of the pulse.
机译:已经开发出一种用于时间分辨的可调二极管激光吸收光谱法(LAS)的方法。在这封信中,我们将详细描述控制LAS系统时间分辨率的已开发电子模块。触发等离子脉冲的晶体管晶体管逻辑信号用于生成两个信号:第一个触发激光波长的微调,第二个控制来自吸收检测器的时间限定信号采样。所描述的方法和电子系统使得能够研究技术等离子体系统中所选粒子的密度和温度的时间演变。周期为10 ms,占空比为1%的大功率脉冲磁控溅射系统已用于验证该方法。在脉冲的有效部分和余辉中测量了氩亚稳密度的时间演变。最终的Ar〜*密度显示出一个双峰结构,在脉冲“结束”后约1 ms处,等离子体“ ON”相具有第一个峰,余辉具有第二个峰。

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