Nikon Projection Lens Update

机译：尼康投影镜头更新

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

This paper describes various kinds of technological improvements in ArF projection lenses for success in very low-ki and high NA lithography. This paper covers optical design, lens manufacturing, aberration characterization, aberration manipulation, flare control, and linear polarizing illumination. Actual lens performance of the Nikon NSR-S307E (0.85NAArF Optics) is also reviewed.

机译：本文介绍了ARF投影镜片中的各种技术改进，用于在非常低ki和高Na光刻中成功。本文涵盖光学设计，透镜制造，像差表征，像差操纵，眩光控制和线性偏振光照明。还审查了尼康NSR-S307E（0.85naarf光学元件）的实际镜头性能。

著录项

来源
《Conference on optical microlithography》|2004年||共12页
会议地点
作者
Tomoyuki Matsuyama; Toshiro Ishiyama; Yasuhiro Ohmura; SPIE-The International Society for Optical Engineering; SPIE v.5377 pt.2;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类石版印刷;
关键词
low-k_1 lithography; ArF projection lens; high NA; aberration; flare; linear polarized illumination;

机译：低K_1光刻;ARF投影镜头;高NA;像差;耀斑;线性偏振光;

相似文献

外文文献
中文文献
专利

1. NIKON 80-400MM LENS UPDATED: Popular lens is finally given an update [J] . MICHAEL TOPHAM What Digital Camera: What to buy...and how to use it . 2013,第200期

机译：尼康80-400MM镜头更新：流行的镜头终于得到更新
2. Nikon lens advice [J] . SPANIEL PETERSEN What Digital Camera: What to buy...and how to use it . 2016,第Nova期

机译：尼康镜头建议
3. Nikon D3300 WITH 18-55MM VRII LENS [J] . Nigel Atherton What Digital Camera: What to buy...and how to use it . 2015,第Juna期

机译：尼康D3300带18-55MM VRII镜头
4. Nikon Projection Lens Update [C] . Tomoyuki Matsuyama, Toshiro Ishiyama, Yasuhiro Ohmura Conference on Optical Microlithography XVII pt.2; 20040224-20040227; Santa Clara,CA; US . 2004

机译：尼康投影镜头更新
5. Evaluation of the thermal design of a liquid-lens cooling system for projection picture tubes. [D] . Lamas, Jose Angel. 2002

机译：投影显像管液镜冷却系统的热设计评估。
6. Subjective Comparison of Pre-Lens Tear Film Stability of Daily Disposable Contact Lenses Using Ring Mire Projection [O] . Christiane Müller, Sebastian Marx, Julia Wittekind, 2020

机译：日常使用环陷投影的隐形眼镜的镜头前泪膜稳定性的主观比较
7. POLA HUBUNGAN FAKTOR-FAKTOR YANG MEMPENGARUHI KEPUTUSAN KONSUMEN DALAM MEMBELI PRODUK KAMERA DIGITAL SINGLE LENS REFLEX (Path Analysis terhadap Fotografer di Yogyakarta dalam Membeli Kamera Digital Single Lens Reflex Canon dan Nikon) [O] . KOPONG FRANSISKUS XAVERIUS D. YOURGEN 2014

机译：购买单镜反光数码相机产品影响消费者决策因素的关系模式（日惹购买佳能和尼康数码单镜头反光相机的摄影师路径分析）

Nikon Projection Lens Update

摘要

著录项

相似文献

相关主题

期刊订阅