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Biprism Interference Micro-Patterning For Periodic Micro-Structure Generation

机译：对周期微结构生成的双层干扰微图案化

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We report a novel laser-based surface micro-patterning process for generating periodic micro-features on flat substrates, using a two-faced Fresnel's biprism to generate interference pattern. The biprism with a large apex angle of 178.50 is mounted coaxially with a collimated homogenized beam to create an interference pattern within the region of intersection of two halves of the beam. The pattern periodicity was approximately 17 microns, with feature depths ranging from 1 - 4 microns. The dependence of depth and depth variation on process parameters such as pulse energy and pulse numbers was studied. The proposed process achieves patterning over an area of approximately 4 mm × 8 mm with 1-8 laser pulses, thereby demonstrating a process speed 2-3 orders of magnitude higher than serial-based writing processes.
机译：我们报告了一种新型的基于激光的表面微图案化工艺，用于在平板上产生周期性微观特征，使用双面菲涅耳的双峰来产生干扰图案。具有大顶角为178.50的双峰的双峰与准直均匀的束同轴安装，以在梁的两个半部的交叉区域内产生干涉图案。图案周期性约为17微米，具有1-4微米的特征深度。研究了深度和深度变化对诸如脉冲能量和脉冲数的过程参数的依赖性。所提出的方法实现了1-8激光脉冲的约4mm×8mm的面积的图案化，从而展示了比基于串口的写入过程高2-3的数量级。

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