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首页> 外文会议>Saint Petersburg International Conference on Integrated Navigation Systems >BALANCING 'SI-FLEX' ACCELEROMETER DESIGNED FOR MEASURING HIGH ACCELERATIONS
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BALANCING 'SI-FLEX' ACCELEROMETER DESIGNED FOR MEASURING HIGH ACCELERATIONS

机译：平衡'SI-Flex'加速度计，专为测量高速加速而设计

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The features of operation of gas-filled accelerometers of navigation class with the elastic suspension of the pendulum made of monocrystalline silicon are considered in the paper. It is shown that existence of non-coincidence between center of mass of the accelerometer pendulum and application point of the force produced by balancing force generator causes angular and translational displacements of the pendulum plate which values are comparable with the gap size of accelerometer gas damper and they are not compensated by accelerometer feedback system. As a result of this fact the accelerometer can lose its functionability at large accelerations. The fabrication and construction reasons of occurring indicated non-coincidence are analyzed. The pendulum suspension is suggested to be implemented by means of cross-shaped flexures made of monocrystalline silicon having high radial flexural stiffness to eliminate accelerometer functionability loss at high accelerations. The possible manufacturing of the pendulum with cross-shaped flexures made of monocrystalline silicon by a method of anisotropic etching was shown. Experimental results and figures of silicon pendulum with cross-shaped flexures are given in the paper as illustrations.
机译：在纸上考虑了具有由单晶硅制成的柱子的弹性悬架的导航级的气体填充加速度计的特征。结果表明，在平衡力发生器产生的加速度计摆锤和施加点的施加点之间存在非巧合的存在，导致摆片的角度和平移位移，该值与加速度计气体阻尼器的间隙尺寸相当它们不会通过加速度计反馈系统来补偿。由于此事实，加速度计可能会在大型加速下失去其功能性。分析了出现的制造和施工原因，表明非巧合。建议通过具有高径向弯曲刚度的单晶硅制成的横向挠曲件来实现摆动悬浮液，以消除高加速度的加速度计功能性损失。示出了通过通过各向异性蚀刻的方法制造具有由单晶硅制成的交叉形弯曲的摆锤。纸张作为图示给出了交叉形弯曲的实验结果和硅柱形图。

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