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首页> 外文会议>Saint Petersburg International Conference on Integrated Navigation Systems >INERTIAL EFFECTS IN SURFACE AND BULK ELASTIC WAVES AND POSSIBILITY OF THEIR USE IN HIGH-G SOLID-STATE MICRO GYROSCOPES
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INERTIAL EFFECTS IN SURFACE AND BULK ELASTIC WAVES AND POSSIBILITY OF THEIR USE IN HIGH-G SOLID-STATE MICRO GYROSCOPES

机译：表面和散装弹性波的惯性效应以及它们在高G固态微陀螺仪中使用的可能性

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The development of miniature and inexpensive solid-state inertial instruments for different applications implicates an urgent and complex group of problems. Besides the level of initial investment, many factors have to be analyzed for various devices in their operating principles. They include requirements on primary cost and expected scale of production, and an effective categorization of instruments with different performance specifications. For application to highly maneuverable objects of a mid-scale production, it has drawn a definite interest to use microelectromechanical gyroscopic sensors (MEMS) utilizing the surface and bulk acoustic waves (SAW and BAW) in piezoelectric crystals. The fundamental inertial effects of rotation on the phase velocity and polarization parameters of elastic waves in solids have been considered earlier. Under the restriction of modern planar technology, the core elements of structures and signal processing for design of solid-state gyroscopes using these effects are described in the present report. To validate correctness of the theory developed in this paper, the experimental and numerical results are given on a new rate sensor fabricated with a thermostable cut of single-crystalline quartz, using technique of interdigital transducers (IDT's). A set of different resonator schemes by Kurosawa, Varadan, et al, who claimed the inertial grade of several deg/h, has been analyzed also. An original joint STM-KIST's variant of an advanced SAW-sensor has been proposed.
机译：不同应用的微型和廉价固态惯性仪器的开发介绍了一个紧急和复杂的问题。除了初始投资水平之外，还必须在其经营原则中分析许多因素。它们包括对主要成本和预期生产规模的要求，以及有效分类的仪器具有不同的性能规范。为了应用于中型生产的高度可动性的物体，它已经利用压电晶体中的表面和散装声波（SAW和BAW）来利用微机电陀螺声传感器（MEMS）来绘制明确的兴趣。早期考虑了旋转对固体弹性波相速度和偏振参数的基本惯性效应。在现代平面技术的限制下，本报告描述了使用这些效果的固态陀螺仪设计的结构和信号处理的核心元素。为了验证本文所开发的理论的正确性，使用叉指式换能器（IDT）的技术制造的新速率传感器，对具有单晶石英的热稳定切割的新速率传感器。还分析了一套由KuroSawa，Varadan等人的不同谐振器方案，他也已经分析了几种Deg / h的惯性等级。已经提出了一个原始的联合STM-KIST的先进锯传感器的变体。

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