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首页> 外文会议>Eurosensors Conference >Finite element analysis of polymer-encapsulated ZnO nanowire-based sensor array intended for pressure sensing in biometric applications
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Finite element analysis of polymer-encapsulated ZnO nanowire-based sensor array intended for pressure sensing in biometric applications

机译：基于聚合物包封的ZnO纳米线的有限元分析，用于生物识别应用中的压力传感

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This work presents results of finite element analysis of an array of ZnO nanowires with bottom-bottom electrode configuration, which are integrated onto a multi-layer chip stack and encapsulated within a polymer. The dynamically-deformed array constitutes a representative part of a high-resolution pressure sensor intended for reliable identification of the smallest fingerprint features such as shape of the ridges and pores. Parametric study was performed in order to predict the most rational values of the Young's modulus and thickness of the encapsulation layer in terms of magnitude and variability of the piezoelectric signals. The results also demonstrate the impact of nanowire aspect ratio and load orientation on the generated electrical signals.
机译：该工作提出了具有底部底部电极配置的ZnO纳米线阵列的有限元分析的结果，其集成到多层芯片堆叠上并封装在聚合物中。动态变形阵列构成高分辨率压力传感器的代表性部分，用于可靠地识别诸如脊和孔的形状的最小指纹特征。在压电信号的幅度和可变性方面进行参数研究以预测杨氏模量和封装层的厚度的最合理值。结果还证明了纳米线纵横比和负载取向对所产生的电信号的影响。

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