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首页> 外文会议>Annual Conference of the Chinese Society of Micro-Nano Technology >Dynamic Characteristics Measurement of Silicon Micro-cantilever in Low Temperature Environment
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Dynamic Characteristics Measurement of Silicon Micro-cantilever in Low Temperature Environment

机译：低温环境中硅微悬臂的动态特性测量

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The dynamic testing system for MEMS in low temperature environment has been developed. A thermoelectric cooling refrigerator was utilized to generate the low temperature environment. The base excitation device was established using the piezoelectric ceramic as the driving source. A vacuum chamber was designed to protect the micro-structure from the humid air. Through the base impact excitation, the resonance frequencies are obtained by analyzing the impulse response signals. The frequency response of micro-cantilever was obtained by using both BIST method and laser Doppler vibrometer. The dynamic testing experiments for the silicon micro-cantilever were carried out from -50°C to room temperature. The result shows that the resonance frequency slightly increases with the decreasing temperature. The measurement device is effective to carry out dynamic testing of microstructure from -50 °C to room temperature.
机译：已经开发出低温环境中MEMS动态测试系统。利用热电冷却冰箱产生低温环境。使用压电陶瓷作为驱动源建立基础励磁装置。设计真空室以保护微结构免受潮湿的空气。通过基础冲击激励，通过分析脉冲响应信号来获得谐振频率。通过使用BIST方法和激光多普勒振动计获得微悬臂的频率响应。硅微悬臂的动态测试实验从-50℃进行到室温。结果表明，谐振频率随温度降低略有增加。测量装置有效地在-50℃下对微观结构进行动态测试至室温。

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