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Effect of Annealing on Undoped and Al- doped Zinc-oxide Thin Films Prepared By Sol-Gel Method

机译:通过溶胶 - 凝胶法制备的未掺杂和掺杂锌氧化物薄膜退火的影响

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The nanocrystalline undoped and Al- doped zinc oxide (ZnO:Al) thin films were deposited on quartz substrate by sol-gel method. The effect of Al-doping along with the heat treatment on undoped & Al-doped ZnO thin films was extensively studied. The ZnO:Al thin films were preferentially c-axis oriented, the effect became more prominent after the heat treatment. Optical properties were studied by using UV-Vis-NIR spectrometer and Photoluminescence (PL) spectrophotometer. Atomic force micrograph revealed compact, void free & uniform deposition of both ZnO & ZnO:Al films.
机译:通过溶胶 - 凝胶法将纳米晶未掺杂和掺杂的氧化锌(ZnO:Al)薄膜沉积在石英底物上。共探测Al-掺杂与热处理的效果进行了广泛地研究了未掺杂的ZnO薄膜的热处理。 ZnO:Al薄膜优先考虑的C轴,在热处理后的效果变得更加突出。通过使用UV-Vis-nir光谱仪和光致发光(PL)分光光度计研究光学性质。原子力显微照片显示ZnO&ZnO:Al薄膜的紧凑,无效和均匀沉积。

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