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The project and simulation of the compositive miniature spectrum instrument

机译：综合微型谱仪的项目和仿真

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This paper advances a kind of micro spectrometer, which is based upon Fabry-Perot antrum's character of filtering the waves. The basic structure of the micro spectrometer is the array of Fabry-Perot antrum which contains many different length of antrum on the substrate of silicon, consequently we can achieve the detector for several wavelengths simultaneously. The unit of probing is a Fabry-Perot antrum, which is made up of the substrate of silicon--metal film--silicon dioxide layer-- metal film. We carried out the corresponding simulation. In the basic structure of aluminum film(14nm)- silicon dioxide layer - silver film(39nm), the resolution can reach 15nm. When the area of a unit of probing is 0.14mmx0.14mm only, it can reach the luminous flux of miniature grating spectrum instrument(the minimum volume in the order of cm),but the volume of the part of spectrum detector is only the order of mm. The design size of the micro spectrometer is in a few millimeters. Furthermore it has no movable parts and could detect several wavelengths at the same time. It is possible to fabricate such micro spectrometer through existing process methods of IC technology.
机译：本文推进了一种微光谱仪，其基于Fabry-Perot Antrum的过滤波的特征。微光谱仪的基本结构是Fabry-Perot antrum的阵列，其在硅的基板上包含许多不同长度的antrum，因此我们可以同时实现多个波长的检测器。探测单位是法布里 - 珀罗antrum，其由硅 - 金属膜 - 二氧化硅层的基材构成 - 金属膜。我们进行了相应的模拟。在铝膜（14nm）的基本结构中 - 二氧化硅层 - 银膜（39nm），分辨率可达到15nm。当探测单元的面积仅为0.14mmx0.14mm时，它可以达到微型光栅谱仪的光通量（按CM的顺序最小体积），但频谱探测器的一部分仅是订单mm。微光谱仪的设计尺寸为几毫米。此外，它没有可移动部件并且可以同时检测多个波长。通过现有的IC技术方法可以制造这种微光谱仪。

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