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The project and simulation of the compositive miniature spectrum instrument

机译：集成微型频谱仪的设计与仿真

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This paper advances a kind of micro spectrometer, which is based upon Fabry-Perot antrum's character of filtering the waves. The basic structure of the micro spectrometer is the array of Fabry-Perot antrum which contains many different length of antrum on the substrate of silicon, consequently we can achieve the detector for several wavelengths simultaneously. The unit of probing is a Fabry-Perot antrum, which is made up of the substrate of silicon--metal film--silicon dioxide layer-- metal film. We carried out the corresponding simulation. In the basic structure of aluminum film(14nm)- silicon dioxide layer - silver film(39nm), the resolution can reach 15nm. When the area of a unit of probing is 0.14mmx0.14mm only, it can reach the luminous flux of miniature grating spectrum instrument(the minimum volume in the order of cm),but the volume of the part of spectrum detector is only the order of mm. The design size of the micro spectrometer is in a few millimeters. Furthermore it has no movable parts and could detect several wavelengths at the same time. It is possible to fabricate such micro spectrometer through existing process methods of IC technology.
机译：本文基于法布里-珀罗（Fabry-Perot）腔的滤波特性，提出了一种微型光谱仪。显微光谱仪的基本结构是法布里-珀罗腔的阵列，该阵列在硅基板上包含许多不同长度的腔，因此我们可以同时实现几种波长的检测器。探测单位是法布里-珀罗腔，它是由硅-金属膜-二氧化硅层-金属膜的基底组成的。我们进行了相应的模拟。在铝膜（14nm）-二氧化硅层-银膜（39nm）的基本结构中，分辨率可以达到15nm。当一个探测单元的面积仅为0.14mmx0.14mm时，它可以达到微型光栅光谱仪的光通量（最小体积为cm量级），而光谱检测器部分的体积仅为该量级。毫米微型光谱仪的设计尺寸为几毫米。此外，它没有活动部件，可以同时检测多个波长。可以通过现有的IC技术处理方法来制造这种微型光谱仪。

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