Arrays of two different sizes, each consisting of 16 by 16 blazed Fresnel zone lenses, were fabricated in quartz glass by means of microstructuring techniques. The lenses were designed for free space optical interconnection networks operating in the IR. In order to achieve high diffraction efficiencies the kinoform profile of the microlenses was approximated by a staircase-like profile. The fabrication of the lenses involved multiple steps of repeated pattern transfer by photolithography and successive reactive ion etching. We fabricated Fresnel zone lenses with 16 levels per zone and with different focal lengths. The individual elements of the two arrays have circular and square apertures with a diameter of 2 mm and 200 $mu@m respectively and were designed to operate at a wavelength of 1.52 $mu@m.
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机译：两种不同尺寸的阵列，每个尺寸由16个闪光菲涅耳区镜片组成，通过微结构技术在石英玻璃中制造。镜片专为在IR中运行的自由空间光学互连网络而设计。为了实现高衍射效率，微透镜的KinoForm轮廓由楼梯状型材近似。镜片的制造涉及通过光刻和连续的反应离子蚀刻的重复图案传递的多个步骤。我们制造了菲涅耳区镜片，每区16级，焦距不同。两个阵列的各个元件分别具有直径为2 mm和200 $ Mu @ M的圆形和方形孔，设计成在1.52 $ MU @ m的波长下操作。
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