STUDY OF DESIGN PARAMETERS IN HYDROGEN MICROSENSORS INTEGRATED WITH METAL SEMICONDUCTOR NANOPARTICLES

机译：金属半导体纳米粒子集成的氢微传感器设计参数研究

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We investigated the effect of electrode design parameters on the performance of hydrogen microsensors. The sensors with varying electrode parameters were fabricated integrating micromachined interdigitated electrodes with indium oxide (In_2O_3) doped polycrystalline tin dioxide (SnO_2) nanoparticles and tested in a controlled gas environment. It was observed that the sensitivity was closely related to the gap between, and a ratio of the gap to the width in interdigitated electrodes (IDE).

机译：我们研究了电极设计参数对氢微传感器性能的影响。具有不同电极参数的传感器是制造与氧化铟（In_2O_3）掺杂的多晶二氧化锡（SnO_2）纳米颗粒的微加工型互联电极的传感器并在受控气体环境中进行测试。观察到敏感性与间隙之间的间隙和间隙与横向电极（IDE）的宽度的比率密切相关。

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《ASME International Mechanical Engineering Congress and Exposition》|2008年||共2页
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P. Zhang; S. Deshpande; P. J. Medelius; S. Seal; H. J. Cho;
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中图分类自动控制、自动控制系统;
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4. STUDY OF DESIGN PARAMETERS IN HYDROGEN MICROSENSORS INTEGRATED WITH METAL SEMICONDUCTOR NANOPARTICLES [C] . P. Zhang, S. Deshpande, P. J. Medelius, International Mechanical Engineering Congress and Exposition 2007 . 2008

机译：集成金属半导体纳米粒子的氢敏传感器的设计参数研究
5. Confocal Microscopy Studies of Fluorescence Blinking of Semiconductor Quantum Dots, Metal Nanoparticle Photogeneration, and Multiphoton Photoemission from Thin Metal Films and Metal Nanoparticles [D] . Baker, Thomas Athanasius 2013

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6. NIOSH Field Studies Team Assessment: Worker Exposure to Aerosolized Metal Oxide Nanoparticles in a Semiconductor Fabrication Facility [O] . Sara A. Brenner, Nicole M. Neu-Baker, Adrienne C. Eastlake, -1

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7. Fast Response Hydrogen Microsensor Based on Semiconductor Niobium-oxide Nanostructures via Smart Anodizing of Al/Nb Metal Layers [O] . Vázquez R.M., Mozalev A., Llobet E. 2014

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8. Integrating and Enhancing Tools for ASIC (Application-Specific Integrated Circuits) Design Using MOSIS (Metal Oxide Semiconductor Implementation Service) Fabrication. [R] . Newport, D. F., Britton, C. L., Alley, G. T., 1989

机译：使用mOsIs（金属氧化物半导体实现服务）制造集成和增强asIC（专用集成电路）设计工具。

STUDY OF DESIGN PARAMETERS IN HYDROGEN MICROSENSORS INTEGRATED WITH METAL SEMICONDUCTOR NANOPARTICLES

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