STUDY OF DESIGN PARAMETERS IN HYDROGEN MICROSENSORS INTEGRATED WITH METAL SEMICONDUCTOR NANOPARTICLES

机译：集成金属半导体纳米粒子的氢敏传感器的设计参数研究

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We investigated the effect of electrode design parameters on the performance of hydrogen microsensors. The sensors with varying electrode parameters were fabricated integrating micromachined interdigitated electrodes with indium oxide (In_2O_3) doped polycrystalline tin dioxide (SnO_2) nanoparticles and tested in a controlled gas environment. It was observed that the sensitivity was closely related to the gap between, and a ratio of the gap to the width in interdigitated electrodes (IDE).

机译：我们研究了电极设计参数对氢微传感器性能的影响。电极参数变化的传感器是通过将微机械指状电极与氧化铟（In_2O_3）掺杂的多晶二氧化锡（SnO_2）纳米粒子集成在一起而制成的，并在受控气体环境中进行了测试。观察到灵敏度与叉指电极（IDE）之间的间隙以及间隙与宽度的比率密切相关。

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《International Mechanical Engineering Congress and Exposition 2007》|2008年|P.541544|共2页
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P. Zhang; S. Deshpande; P. J. Medelius; S. Seal; H. J. Cho;
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中图分类自动控制、自动控制系统;
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机译：使用mOsIs（金属氧化物半导体实现服务）制造集成和增强asIC（专用集成电路）设计工具。

STUDY OF DESIGN PARAMETERS IN HYDROGEN MICROSENSORS INTEGRATED WITH METAL SEMICONDUCTOR NANOPARTICLES

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