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The improvement of temperature coefficient of frequency in thin film bulk acoustic wave resonator using secondary harmonics

机译：二次谐波薄膜堆积声波谐振器温度系数的提高

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We have succeded in making an 870MHz-range thin film bulk acoustic wave (BAW) resonator that has a small temperature coefficient of frequency (TCF) using secondary harmonics.The 870MHz-range BAW resonator has been requested to have nearly zero TCF,because it will be used in an oscillator for remote keyless entry systems.The BAW resonator has composite structure that consists of Al electrodes and ZnO/SiO_2.

机译：我们已经成功地制作了一个870MHz范围的薄膜散声声波（BAW）谐振器，其使用二次谐波具有小的频率温度（TCF）。870MHz范围的BAW谐振器已被要求具有近零TCF，因为它将用于远程无钥匙进入系统的振荡器。BAW谐振器具有由Al电极和ZnO / SiO_2组成的复合结构。

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《Materials Research Society Symposium》|2003年||共6页
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Yukio Yoshino; Masaki Takeuchi; Hajime Yamada; Yoshihiko Goto; Tadashi Nomura; Takahiro Makino; Seiichi Arai;
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中图分类工程材料学;
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1. Control of temperature coefficient of frequency in zinc oxide thin film bulk acoustic wave resonators at various frequency ranges [J] . Yoshino Y., Takeuchi M., Inoue K., Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology . 2002,第3a4期

机译：在不同频率范围内控制氧化锌薄膜体声波谐振器的频率温度系数
2. Improvement of the crystallinity of ZnO thin films and frequency characteristics of a film bulk acoustic wave resonator by using an Ru buffer layer and annealing treatment [J] . Kim EK, Lee TY, Hwang HS, Superlattices and microstructures . 2006,第1a4期

机译：通过使用Ru缓冲层和退火处理来改善ZnO薄膜的结晶度和薄膜压电谐振器的频率特性
3. Bulk acoustic wave resonators using ZnO piezoelectric thin films - challenges of zero temperature characteristics of frequency in various frequency ranges [J] . Yukio Yoshino, Masaki Takeuchi, Kazuhiro Inoue, 電子情報通信学会技術研究報告. 電子部品·材料. Component Parts and Materials . 2000,第395期

机译：散装声波谐振器采用ZnO压电薄膜 - 各种频率范围内频率零温度特性的挑战
4. The improvement of temperature coefficient of frequency in thin film bulk acoustic wave resonator using secondary harmonics [C] . Yukio Yoshino, Masaki Takeuchi, Hajime Yamada, Materials Research Society Symposium . 2003

机译：二次谐波薄膜堆积声波谐振器温度系数的提高
5. High frequency thin-film bulk acoustic wave resonators for gas- and bio-analytical applications [D] . Ashley, G. M. 2005

机译：用于气体和生物分析应用的高频薄膜体声波谐振器
6. Resonance Spectrum Characteristics of Effective Electromechanical Coupling Coefficient of High-Overtone Bulk Acoustic Resonator [O] . Jian Li, Mengwei Liu, Chenghao Wang 2016

机译：高泛音体声波谐振器有效机电耦合系数的共振谱特性
7. Effect of interface roughness on acoustic loss in tunable thin film bulk acoustic wave resonators [O] . Vorobiev, Andrei, Berge, John, Gevorgian, Spartak, 2011

机译：界面粗糙度对可调薄膜体声波谐振器声损耗的影响
8. Progress in the Development of Miniature Thin Film BAW (Bulk Acoustic Waves) Resonator and Filter Technology. [R] . Grudkowski, T. W., Black, J. F., Drake, G. W., 1982

机译：微型薄膜BaW（体声波）谐振器及滤波技术的发展进展。

The improvement of temperature coefficient of frequency in thin film bulk acoustic wave resonator using secondary harmonics

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