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Diamond-Like Carbon Film Deposition on an Artificial Heart Blood Pump using a Flexible Type Electrode with r.f. Plasma CVD Processing

机译:使用柔性型电极与R.F的柔性型电极在人造心脏血液上的金刚石碳膜沉积。等离子体CVD加工

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Diamond-like carbon (DLC) film was deposited uniformly on an irregular structure such as a polyurethane artificial heart blood pump using a special 3-dimensional type electrode. Process of applying the DLC film coating is accomplished by inserting a large number of small metallic balls (phi 0.8 mm chromium balls). It is then possible to adjust the shape of the electrode in such a way that the DLC film coating can be applied to the irregular surface of the artificial heart. In investigating the availability of the electrode, under helium (He) plasma, the plasma states were measured using double probe analysis. Lateral profiles of the electron temperature were higher in the centre and decreased towards the edges of the electrode. On the other hand, the plasma density profiles were lower in the centre part than at the edges. The electrode kept ion sheath on the artificial heart blood pump's surface at self-bias voltage uniformly. The results were that the DLC film was deposited completely on the artificial heart blood pump at the film thickness of approximately 350 - 380 nm. Additionally the film structure was uniform.
机译:使用特殊的三维型电极均匀地沉积金刚石碳(DLC)膜,例如聚氨酯人造心脏血液泵。通过插入大量小金属球(PHI 0.8mm铬球)来实现施加DLC膜涂层的方法。然后可以以这样的方式调节电极的形状,使得DLC膜涂层可以应用于人造心脏的不规则表面。在研究电极的可用性下,在氦气(HE)等离子体下,使用双重探针分析测量等离子体状态。中心的电子温度的横向轮廓较高并朝向电极的边缘降低。另一方面,在中心部分的等离子体密度型材较低而不是边缘。电极在人造心脏泵表面上保持离子护套,均匀地自偏置电压。结果是DLC薄膜在人造心脏血液泵上完全沉积在约350-380nm的膜厚度上。另外,薄膜结构是均匀的。

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