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首页> 外文会议>Symposium on multicomponent oxide films for electronics >Oxide film for mation on metals and aloys by thermal, elecroschemical and plasma oxidation and prediction of resulting structures
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Oxide film for mation on metals and aloys by thermal, elecroschemical and plasma oxidation and prediction of resulting structures

机译：通过热，电化学和等离子体氧化和所得结构的预测，在金属和合金上进行配合的氧化膜

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Multicomponent oxide films are needed to meet the increasing demands of the electronics industry. Three main methods that involve oxidation of a metallic substrate are thermal, anodic and plasma oxidation. Today we do not have an adequate fundamental physical -chemical model of how multicomponent oxides evolve on alloys under these oxidizing conditions to design a wide range of materials for electronic devices. The three methods will be discussed in terms of physical/chemical parameters that influence the chemical nature and structure of the resulting oxides. By using surface studies of the oxidation behavior of numerous metals and alloys we have been able to delineate the factors which are most important to the oxide formation process and provide insight into the prediction of oxide layer structures. The electrochemical processes that occur during the materials reaction with a chosen environment will be used to discuss the physical and chemical mechanisms involved. Intrinsic and extrinsic electric fields will be shown to influence the chemical and structural nature of the resulting oxide structures. Examples will be presented from a number of metla and alloy systems that have been examined in our laboratory. These include Al,Ti,Zr,Nb,Mn,Cu and Ni and some of their selected alloys. The models that have developed from these studies are providing some predictive power in how the complex oxide overlayer will be chemically speciated and on its structure.
机译：需要多组分氧化膜来满足电子行业的不断增加的需求。涉及金属基材氧化的三种主要方法是热，阳极和等离子体氧化。如今，我们没有足够的基本物理学 - 化学模型，其多组分氧化物在这些氧化条件下的氧化物上发展，以设计用于电子设备的各种材料。将在影响所得氧化物的化学性质和结构的物理/化学参数方面讨论这三种方法。通过使用对许多金属和合金的氧化行为的表面研究，我们能够描绘对氧化物形成过程最重要的因素，并提供对氧化物层结构预测的洞察。在与所选环境中的材料反应期间发生的电化学过程将用于讨论所涉及的物理和化学机制。将显示内在和外部电场以影响所得氧化物结构的化学和结构性质。将从我们的实验室中检查的许多Metla和合金系统中提出。这些包括Al，Ti，Zr，Nb，Mn，Cu和Ni以及它们的一些选定合金。从这些研究中开发的模型在复合氧化物覆盖层将如何化学标注和其结构上提供了一些预测力。

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