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Normal-incident SiGe/Si MQW photodetectors operating at 1.3 um

机译:正常入射SIGE / SI MQW光电探测器在1.3 um工作

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摘要

A normal-incident SiGe/Si multiple quantum wells photodetector was reported. The structure and fabrication process of the photodetector were introduced. The photocurrent spectra measurement showed that the response spectra was expanded to 1.3 $mu@m wavelength. The quantum efficiency of the photodetector was 0.1 percent at 1.3 $mu@m and 20 percent at 0.95 $mu@m.
机译:报道了正常入射的SiGe / Si多量子阱光电探测器。引入了光电探测器的结构和制造过程。光电流光谱测量表明,响应光谱扩展到1.3 $ MU @ M波长。光电探测器的量子效率为1.3 $ mu @ m的0.1%,20%在0.95 $ mu @ m。

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