The responsivity of several types of silicon photodiodes has been determined in the soft X-ray and X-ray range by comparison to two primary detector standards using monochromatized synchrotron radiation at three different beamlines of the PTB radiometry laboratory at BESSY II. The linearity and homogeneity of the responsivity have also been investigated. While a supralinearity was found for some diodes, pronounced inhomogeneities were found for other diodes especially for photon energies above the Ag K absorption edge.
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