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Research of 3D Precision Laser Processing Equipment with Wide Processing Area

机译：广泛加工区3D精密激光加工设备研究

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We have developed a fine laser processing equipment with high accuracy positioning as well as wide processing area. Galvanometer scanners and scanning lens make it possible to move the laser spots faster than mechanical stages do. So far this equipment had a large field curvature giving a bad influence on precision processing over wide scanning area. So we examined an influence of beam expander lens on field curvature by both an optical analysis and experiments. In the analysis the minimum field curvature was about 0.14mm. On the other hand the measured minimum field curvature was about 4 times larger than the analytical value. After the processing to evaluate process performance of this system the process marks were measured with an optical microscope and a surface profilometer.
机译：我们开发了一种具有高精度定位的精细激光加工设备以及宽阔的加工区。电流仪扫描仪和扫描镜头使得可以比机械阶段更快地移动激光斑点。到目前为止，该设备具有大型场曲率，对宽扫描区域的精密加工产生了不良影响。因此，我们通过光学分析和实验检查了光束扩展器镜头对场曲率的影响。在分析中，最小场曲率约为0.14mm。另一方面，测量的最小场曲率约为分析值的4倍。在处理该系统的过程性能之后，用光学显微镜和表面轮廓仪测量过程标记。

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