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首页> 外文会议>Conference on MEMS/MOEMS Components and Their Applications >Microfabrication and test of pre-aligned fiber bundle couplers with integrated microlens array
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Microfabrication and test of pre-aligned fiber bundle couplers with integrated microlens array

机译：具有集成微透镜阵列的预先排列纤维束耦合器的微制造和测试

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This paper describes the design, microfabrication and testing of a pre-aligned array of fiber couplers with integrated out-of-plane microlenses using direct UV lithography of SU-8. The fiber bundle coupler includes a refractive microlens array and two fiberport collimator arrays. With the optical axis of the pixels parallel to the substrate, each pixel of the microlens array can be pre-aligned with the corresponding pixels of the fiberport collimator array as defined by the lithography mask design. This out-of-plane polymer microlens array was pre-aligned with the fiber collimator arrays with no additional adjustment and assembly required. This novel approach helps to dramatically reduce the running cost and improve the alignment quality and coupling efficiency.
机译：本文介绍了具有使用SU-8直接UV光刻的具有集成外部微透镜的预先调配的光纤耦合器阵列的设计，微制造和测试。纤维束耦合器包括折射微透镜阵列和两个光纤准直器阵列。利用平行于基板的像素的光轴，微透镜阵列的每个像素可以与由光刻掩模设计定义的光纤准直器阵列的相应像素预先对准。该平面外聚合物微透镜阵列与纤维准直器阵列预先对准，无需额外调节和组装。这种新颖的方法有助于显着降低运行成本并提高对准质量和耦合效率。

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