Microfabrication and Test of Pre-aligned Fiber Bundle Couplers with Integrated Microlens Array

机译：集成微透镜阵列的预对准光纤束耦合器的微加工和测试

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This paper describes the design, microfabrication and testing of a pre-aligned array of fiber couplers with integrated out-of-plane microlenses using direct UV lithography of SU-8. The fiber bundle coupler includes a refractive microlens array and two fiberport collimator arrays. With the optical axis of the pixels parallel to the substrate, each pixel of the microlens array can be pre-aligned with the corresponding pixels of the fiberport collimator array as defined by the lithography mask design. This out-of-plane polymer microlens array was pre-aligned with the fiber collimator arrays with no additional adjustment and assembly required. This novel approach helps to dramatically reduce the running cost and improve the alignment quality and coupling efficiency.

机译：本文介绍了使用SU-8直接UV光刻技术对带有集成面外微透镜的光纤耦合器预对准阵列的设计，微加工和测试。光纤束耦合器包括折射微透镜阵列和两个光纤端口准直器阵列。在像素的光轴与基板平行的情况下，微透镜阵列的每个像素可以与光刻掩模设计所定义的光纤端口准直器阵列的相应像素预先对齐。将该平面外聚合物微透镜阵列与光纤准直器阵列预先对准，而无需其他调整和组装。这种新颖的方法有助于显着降低运行成本，并提高对准质量和耦合效率。

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来源
《MEMS/MOEMS Components and Their Applications III》|2006年|P.61130Y.1-61130Y.11|共11页
会议地点 San JoseCA(US)
作者
Ren Yang; Steven A. Soper; Wanjun Wang;
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作者单位

Department of Mechanical Engineering, Center for BioModular Multi-Scale Systems Louisiana State University, Baton Rouge, LA 70803;

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会议组织
原文格式 PDF
正文语种 eng
中图分类微电子学、集成电路（IC）;
关键词
UV lithography; free-space optics; pre-aligned; integrated optical systems; out-of-plane refractive microlens; 3D microlens; fiberport collimator array; fiber bundle coupler; SU-8;

机译：紫外光刻;自由空间光学;预对准;集成光学系统;面外折射微透镜; 3D微透镜;光纤端口准直器阵列;光纤束耦合器; SU-8;

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1. Microfabrication of pre-aligned fiber bundle couplers using ultraviolet lithography of SU-8 [J] . Yang R, Soper SA, Wang WJ Sensors and Actuators, A. Physical . 2006,第1期

机译：SU-8紫外光刻技术对预对准光纤束耦合器的微细加工
2. Design of the microlens arrays coupling with imagingfiber bundle [J] . YAN Xing-tao, YANG Jian-feng, XUE Bin, 光电子快报：英文版 . 2013,第003期

机译：结合成像纤维束的微透镜阵列设计
3. A monolithically integrated butt-coupled 3D bulk CMOS Si photodetector array with a fiber couplers platform on a single-chip [J] . Iman Sabri Alirezaei, Joerg Vierhaus, Edmund P. Burte Sensors and Actuators, A. Physical . 2017,第期

机译：一种单片集成的对接3D散装CMOS SI光电探测器阵列，具有单芯片的光纤耦合器平台
4. Microfabrication and test of pre-aligned fiber bundle couplers with integrated microlens array [C] . Ren Yang, Steven A. Soper, Wanjun Wang Conference on MEMS/MOEMS Components and Their Applications . 2006

机译：具有集成微透镜阵列的预先排列纤维束耦合器的微制造和测试
5. FIBER-COUPLED MULTI-CHANNEL WAVEGUIDE ARRAYS WITH AN INTEGRATED DISTRIBUTED FEEDBACK DYE LASER SOURCE. [D] . SAMBAMURTHY, SRIRAM. 1980

机译：光纤耦合多通道波导阵列，具有集成的分布式反馈染料激光源。
6. Microfabrication of pre-aligned fiber bundle couplers using ultraviolet lithography of SU-8 [O] . Ren Yang, Steven A. Soper, Wanjun Wang -1

机译：SU-8紫外光刻技术对预对准光纤束耦合器的微细加工
7. Microfabrication of pre-aligned fiber bundle couplers using ultraviolet lithography of SU-8 [O] . Yang Ren, Soper Steven A., Wang Wanjun 2006

机译：SU-8紫外光刻技术对预对准光纤束耦合器的微细加工

Microfabrication and Test of Pre-aligned Fiber Bundle Couplers with Integrated Microlens Array

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