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Characterization of Green Laser Crystallized GeSi Thin Films

机译：绿色激光结晶GESI薄膜的表征

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Green laser crystallization of a-Ge_(0.85)Si_(0.15) films deposited using Low Pressure Chemical Vapour Deposition is studied. Large grains of 8×2 μm~2 size were formed using a location-controlled approach. Characterization is done using Scanning Electron Microscopy, Atomic Force Microscopy, X-Ray Photoelectron Spectroscopy and X-Ray Diffraction.

机译：研究了使用低压化学气相沉积的A-Ge_（0.85）Si_（0.15）Si_（0.15）膜的绿色激光结晶。使用位置控制的方法形成大8×2μm〜2尺寸的大谷物。使用扫描电子显微镜，原子力显微镜，X射线光电子体光谱和X射线衍射进行表征。

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《MRS meeting》|2012年||共6页
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Balaji Rangarajan; lhor Brunets; Peter Oesterlin; Alexey Y. Kovalgin; Jurriaan Schmitz;
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1. Laterally Confined Large-Grained Poly-GeSi Films:Crystallization and Dopant Activation Using Green Laser [J] . Balaji Rangarajan, Alexey Y. Kovalgin, Peter OesterIin ECS Journal of Solid State Science and Technology . 2012,第6期

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2. Electrochemical And Raman-scattering Characterizations Of Defectsin Polycrystalline Silicon Thin Films Formed By Excimer-laser Annealing,rnsolid-phase Crystallization, And Continuous-wave Laser Lateral Crystallization [J] . Kuninori Kitahara, Yasutaka Ohashi, Kenichi Yamamoto, Japanese journal of applied physics . 2009,第2期

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3. Crystallization of Double-Layered Silicon Thin Films by Solid Green Laser Annealing for High-Performance Thin-Film Transistors [J] . Yuta Sugawara, Yukiharu Uraoka, Hiroshi Yano, IEEE Electron Device Letters . 2007,第期

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4. Characterization of Green Laser Crystallized GeSi Thin Films [C] . Balaji Rangarajan, lhor Brunets, Peter Oesterlin, MRS meeting . 2012

机译：绿色激光结晶GESI薄膜的表征
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Characterization of Green Laser Crystallized GeSi Thin Films

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