Fluorinated-HfO_2 ISFET as pK sensor with highly sensitivity

机译：氟化-HFO_2 ISFET作为PK传感器，具有高灵敏度

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

Ion Sensitive Field-Effect Transistor (ISFET)-based sensors with fluorinated-hafnium oxide (HfO_2) thin film fabricated by atomic layer deposition (ALD) and thermal carbon tetrafluoride (CF_4) plasma posttreatment was investigated for pK detection. The developed fluorinated-HfO_2 ISFET is highly sensitive to K~+ ions (59.5 mV/pK) in the concentration range between 0.01 and 100 mM. When compared to the same structure without plasma treatment, the sensitivity was improved by fourteenfold.

机译：基于原子层沉积（ALD）和热碳四氟化物（ALD）和热碳四氟化物（CF_4）血浆后处理的离子敏感场效应晶体管（ISFET）的传感器。所开发的氟化-HFO_2 ISFET在0.01和100mm之间的浓度范围内高敏感于K〜+离子（59.5mV / pk）。与不具有等离子体处理的不相同的结构相比，敏感性得到了四分之倍。

著录项

来源
《International Meeting on Chemical Sensors》|2012年||共3页
会议地点
作者
Tseng-Fu Lu; Kuan-I Ho; Dorota G. Pijanowska; Bohdan Jaroszewicz; Michal Zaborowski; Chia-Ming Yang; Jer-Chyi Wang; Chao-Sung Lai;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类自动化技术及设备;
关键词
ISFET; ALD; HfO_2; CF_4 plasma; and pK sensor;

机译：ISFET;ALD;HFO_2;CF_4等离子体;和PK传感器;

相似文献

外文文献
中文文献
专利

1. ISFET Based DNA Sensor: Current-Voltage Characteristic and Sensitivity to DNA Molecules [J] . Lusine Gasparyan, Ilya Mazo, Vahan Simonyan, Open Journal of Biophysics . 2019,第4期

机译：基于ISFET的DNA传感器：电流电压特性和对DNA分子的敏感性
2. A Reconfigurable and Portable Highly Sensitive Biosensor Platform for ISFET and Enzyme-Based Sensors [J] . Ikho Lee, Seung-Woo Lee, Ki-Young Lee, IEEE sensors journal . 2016,第11期

机译：适用于ISFET和基于酶的传感器的可重构和便携式高灵敏度生物传感器平台
3. Electrostatic effects in highly charged proteins:salt sensitivity of pK_a values of histidines in staphylococcal nuclease [J] . Kelly K.Lee, Carolyn A.Fitch, Juliette T.J.Lecomte, Biochemistry . 2002,第17期

机译：高电荷蛋白质中的静电作用：葡萄球菌核酸酶中组氨酸的pK_a值的盐敏感性
4. Fluorinated-HfO_2 ISFET as pK sensor with highly sensitivity [C] . Tseng-Fu Lu, Kuan-I Ho, Dorota G. Pijanowska, International Meeting on Chemical Sensors . 2012

机译：氟化-HFO_2 ISFET作为PK传感器，具有高灵敏度
5. Development of a low-cost, high-sensitivity, and highly accurate sensor for dissolved CO2 measurements in natural waters based on the change in fluorescence of the pH sensitive indicator 8 - Hydroxypyrene - 1,3,6 - trisulfonic acid, trisodium salt (HPTS) in solution due to the diffusion of CO2 across a gas permeable membrane. [D] . Henderson, Robert M. 2012

机译：基于pH敏感指示剂8-羟基change-1,3,6-三磺酸三钠盐（HPTS）荧光的变化，开发了一种低成本，高灵敏度，高精度的自然水中溶解CO2测量传感器溶液中的CO2扩散到整个透气膜上。
6. An Integrated ISFET Sensor Array [O] . Kazuo Nakazato 2009

机译：集成式ISFET传感器阵列
7. ISFET Based DNA Sensor: Current-Voltage Characteristic and Sensitivity to DNA Molecules [O] . Lusine Gasparyan, Ilya Mazo, Vahan Simonyan, 2019

机译：基于ISFET的DNA传感器：电流 - 电压特性和对DNA分子的敏感性

Fluorinated-HfO_2 ISFET as pK sensor with highly sensitivity

摘要

著录项

相似文献

相关主题

期刊订阅