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首页> 外文会议>International Conference on Measurement, Instrumentation and Automation >Ethanol sensitivity of thermally evaporated nanostructured WO_3 thin films doped and implanted with Fe
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Ethanol sensitivity of thermally evaporated nanostructured WO_3 thin films doped and implanted with Fe

机译：乙醇敏感性纳米结构WO_3薄膜掺杂并注入Fe

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摘要

Ethanol sensing performance of gas sensors made of Fe doped and Fe implanted nanostructured WO_3 thin films prepared by a thermal evaporation technique was investigated. Three different types of nanostructured thin films, namely, pure WO_3 thin films, iron-doped WO_3 thin films by co-evaporation and Fe-implanted WO_3 thin films have been synthesized. All the thin films have a film thickness of 300 nm. The physical, chemical and electronic properties of these films have been optimized by annealing heat treatment at 300°C and 400°C for 2 hours in air. Various analytical techniques were employed to characterize these films. Atomic Force Microscopy and Transmission Electron Microscopy revealed a very small grain size of the order 5-10 nm in as deposited WO_3 films, and annealing at 300°C or 400°C did not result in any significant change in grain size. This study has demonstrated enhanced sensing properties of WO_3 thin film sensors towards ethanol at lower operating temperature, which was achieved by optimizing the physical, chemical and electronic properties of the WO_3 film through Fe doping and annealing.
机译：研究了由Fe掺杂和Fe植入纳米结构WO_3薄膜制成的气体传感器的乙醇感测性能进行了研究。三种不同类型的纳米结构薄膜，即纯WO_3薄膜，通过共蒸发和Fe-incormanted WO_3薄膜合成了铁掺杂WO_3薄膜。所有薄膜的膜厚度为300nm。这些薄膜的物理，化学和电子性质通过在300℃和400℃的空气中退火热处理2小时而优化。采用各种分析技术表征这些薄膜。原子力显微镜和透射电子显微镜显示出在沉积的WO_3薄膜中的5-10nm的非常小的晶粒尺寸，并且在300℃或400℃下退火不会导致晶粒尺寸的任何显着变化。该研究证明了在较低工作温度下对乙醇的WO_3薄膜传感器的增强感测性能提高，这是通过优化通过Fe掺杂和退火的WO_3膜的物理，化学和电子性质来实现。

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