Effect of microwave irradiation on rapid crystallization of ferroelectric lead zirconate titanate thin films

机译：微波辐射对铁电引线锆钛薄膜快速结晶的影响

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Ferroelectric Pb(Zr_(0.52)Ti_(0.48))O_3 (PZT) thin films rapidly crystallized by microwave irradiation were compared with those obtained by conventional furnace process. The PZT films under microwave irradiation at 650 °C for 60 s were crystallized well in to the perovskite phase, and showed better electrical properties than those crystallized by conventional furnace annealing at 650 °C for 30 min. It is clear that microwave irradiation is effective for obtaining well-crystallized PZT films with good properties in a short process time.

机译：将通过微波辐射快速结晶的铁电PB（Zr_（0.52）Ti_（0.48））O_3（PZT）薄膜与通过常规炉方法获得的薄膜。在650℃下微波照射的PZT膜在650℃下结晶到钙钛矿相中，并且表现出比在650℃下通过650℃的常规炉退火结晶的电性能更好。很明显，微波辐射对于在短工序时间内具有良好性质的良好性质的良好结晶的PZT薄膜是有效的。

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《International forum on advanced materials science and technology》|2013年||共4页
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Xianwei Wang; Zhanjie Wang; Yanna Chen; Yuqing Zhang; Zhidong Zhang;
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中图分类工程材料一般性问题;
关键词
Pb(Zr_(0.52)Ti_(0.48))O_3 thin films; sol-gel method; microwave annealing; crystallization; microstructure; ferroelectric;

机译：PB（Zr_（0.52）TI_（0.48））O_3薄膜;溶胶 - 凝胶法;微波退火;结晶;微观结构;铁电;

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1. Effect of microwave irradiation on rapid crystallization of ferroelectric lead zirconate titanate thin films [J] . Xianwei Wang, Zhanjie Wang, Yanna Chen, Materials science forum . 2013,第期

机译：微波辐射对铁电锆钛酸铅钛薄膜快速结晶的影响
2. Rapid Crystallization Of Sol-gel-deposited Lead Zirconate Titanate Thin Films By 2.45 Ghz Microwave Irradiation [J] . Zhan Jie Wang, Yuka Otsuka, Ziping Cao, Japanese journal of applied physics . 2008,第9issue2期

机译：2.45 Ghz微波辐射使溶胶-凝胶沉积锆钛酸铅钛薄膜快速结晶。
3. Crystallization of Ferroelectric Lead Zirconate Titanate Thin Films by Microwave Annealing at Low Temperatures [J] . Zhanjie Wang, Yanna Chen, Yuka Otsuka, International Journal of Applied Ceramic Technology / Functional Ceramics . 2011,第2期

机译：低温微波退火对铁电锆钛酸铅钛薄膜的晶化
4. Effect of microwave irradiation on rapid crystallization of ferroelectric lead zirconate titanate thin films [C] . Xianwei Wang, Zhanjie Wang, Yanna Chen, International forum on advanced materials science and technology . 2013

机译：微波辐射对铁电引线锆钛薄膜快速结晶的影响
5. Development of Chemical Solution Deposited Lead Zirconate Titanate Ferroelectric Thin Films for Non-planar Substrates [D] . Cook, Chloe Eileen. 2019

机译：用于非平面基材的化学溶液沉积锆钛酸钛酸盐铁电薄膜的研制
6. Large Electrocaloric Effect in Relaxor Ferroelectric and Antiferroelectric Lanthanum Doped Lead Zirconate Titanate Ceramics [O] . Biao Lu, Peilian Li, Zhenhua Tang, -1

机译：弛豫铁电和反铁电掺杂镧锆钛酸铅陶瓷中的大电热效应
7. Thickness effect on the dielectric, ferroelectric, and piezoelectric properties of ferroelectric lead zirconate titanate thin films [O] . J. Pérez de la Cruz, E. Joanni, P. M. Vilarinho, 2010

机译：铁电引线锆钛晶薄膜电介质，铁电和压电性能的厚度效应
8. Oriented lead zirconate titanate thin films: Characterization of film crystallization [R] . Voigt, J. A., Tuttle, B. A., Headley, T. J., 1993

机译：取向锆钛酸铅薄膜：薄膜结晶的表征

Effect of microwave irradiation on rapid crystallization of ferroelectric lead zirconate titanate thin films

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