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Study on the Reliability Problem of MEMS Fuze Mechanism

机译：MEMS引信机制可靠性问题研究

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摘要

MEMS technology has become the hotspot of fuze development currently, but the reliability problems seriously influence the application of MEMS in fuze. By way of analyzing the characteristic of MEMS fuze mechanism in aspects of process technics, material behavior, structure form and micro size effect, it shows that the reliability of MEMS mechanism is quite different from the traditional fuze. The environment stress in full life cycle of fuze and the main failure mode of MEMS mechanism under environment stress have been analyzed, and the interrelated matrix between environment stress and failure mode has been presented. Based on these investigation, the reliability testing method of MEMS fuze mechanism has been studied, which can provide guidance for the reliability testing of MEMS fuze mechanism.
机译：MEMS技术目前已成为引信发展的热点，但可靠性问题严重影响了MEMS在引信中的应用。通过分析MEMS Fuze机制的特征，在工艺技术，材料行为，结构形式和微尺寸效应方面，表明MEMS机构的可靠性与传统的引信有很大差异。已经分析了环境应力下的环境压力的全生命周期的环境应力，并介绍了环境应力与失效模式之间的相互关联的矩阵。基于这些调查，研究了MEMS引信机制的可靠性测试方法，可以为MEMS引信机制的可靠性测试提供指导。

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