The Effects of Deposition Methods For Metal Catalyst Formation in Carbon Nanotubes Growth

机译：碳纳米管生长中金属催化剂形成沉积方法的影响

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In this study, we examine the effect of two different metal catalyst deposition methods in carbon nanotubes (CNT) growth for interconnect application. Metal support layer, which is Titanium Nitride (TiN) was first deposited on Silicon Dioxide (SiO_2) pads, Then, nickel (Ni) catalyst was deposited, first; by sputtering technique to form uniform thin film, and second; by cluster tool where spherical metal catalyst was formed. These metal catalysts were annealed at 400 °C, 500 °C and 600 °C. The image shows that the number of Ni particles for cluster techniques was higher than thin film sample. While, the average diameter of particles for thin film samples were higher than that in cluster samples. For the CNT growth, the density of the growth was believed to be higher for thin film samples than cluster samples. Raman spectroscopy was used to investigate the quality of CNT.

机译：在该研究中，我们研究了两种不同金属催化剂沉积方法在碳纳米管（CNT）生长中的互连施用的效果。首先将是氮化硅（锡）沉积在二氧化硅（SiO_2）垫上的金属支撑层，然后沉积镍（Ni）催化剂;通过溅射技术形成均匀的薄膜，第二;通过形成球形金属催化剂的簇工具。将这些金属催化剂在400℃，500℃和600℃下退火。该图像表明聚类技术的Ni粒子的数量高于薄膜样品。虽然，薄膜样品的颗粒的平均直径高于簇样品中的颗粒。对于CNT生长，据信薄膜样品的生长密度比簇样品更高。拉曼光谱法用于研究CNT的质量。

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《International Conference on Fundamental and Applied Sciences》|2014年||共7页
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Siti S. Mat Isa; Muhammad M. Ramli;
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中图分类 TB11-532;
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Carbon; image; particles;

机译：碳;图像;粒子;

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1. Intermetallic catalyst for carbon nanotubes (CNTs) growth by thermal chemical vapor deposition method [J] . Chia-Ming Chen, Yong-Ming Dai, Jenn Gwo Huang Carbon: An International Journal Sponsored by the American Carbon Society . 2006,第9期

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2. On the Growth Mechanism of Single-Walled Carbon Nanotubes by Catalytic Carbon Vapor Deposition on Supported Metal Catalysts [J] . J. B. Nagy, G. Bister, A. Fonseca, Journal of nanoscience and nanotechnology . 2004,第4期

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3. Selective Hydrogenation of Citral with Carbon Nanotubes Supported Bimetallic Catalysts Prepared by Deposition-Reduction in Liquid Phase and Conventional Impregnation Methods [J] . Stassi Julieta P., Rodriguez Virginia I., Yanez Maria J., Catalysis Letters . 2017,第8期

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4. The Effects of Deposition Methods For Metal Catalyst Formation in Carbon Nanotubes Growth [C] . Siti S. Mat Isa, Muhammad M. Ramli International Conference on Fundamental and Applied Sciences . 2014

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5. Vertically aligned single-walled carbon nanotube growth from iron-molybdenum catalyst; an experiment and modeling approach to why deposition order matters [D] . Pint, Cary 2009

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6. Influence of Metal Deposition and Activation Method on the Structure and Performance of Carbon Nanotube Supported Palladium Catalysts [O] . Wouter S. Lamme, Dr. Jovana Zečević, Prof. Dr. Krijn P. de Jong -1

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7. Patterned growth of carbon nanotubes on Si substrates without predeposition of metal catalysts [O] . Chen, Ying, Yu, Jun 2005

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8. Growth and Characterization of Carbon Nanotubes on Constantan (Cu-Ni-Mn Alloy) Metallic Substrates Without Adding Additional Catalysts (Postprint) [R] . Varanasi, C. V., Bulmer, J., Brunke, L., 2008

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The Effects of Deposition Methods For Metal Catalyst Formation in Carbon Nanotubes Growth

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