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首页> 外文会议>International Conference on Advanced Materials Science and Technology >Inexpensive Home-Made Single Wavelength Ellipsometer (A = 633 nm) for Measuring the Optical Constant of Nanostructured Materials
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Inexpensive Home-Made Single Wavelength Ellipsometer (A = 633 nm) for Measuring the Optical Constant of Nanostructured Materials

机译：廉价的自制单波长椭圆仪（A = 633nm），用于测量纳米结构材料的光学常数

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Inexpensive home-made Single wavelength Ellipsometry with RAE (Rotating Analyser Ellipsometer) configuration has been developed. Spectroscopic ellipsometry (SE) is an optical measurement technique which is based on the measurement of the change of the phase difference (A) and the amplitude ratio (ψ) between p and s linear polarized of reflected (or transmitted) light. Our RAE configuration system composed of polarizer, sample, analyzer, detector, and He-Ne laser (A = 633 nm) that acted as the monochromatic light source. To test the reliability of our SE system, we measure the optical constant of Au bulk and Cr (30 nm thick) film. The optical constant and the thickness were extracted by employing the pseudo-dielectric function and numerical inversion which is based on the secant method, the ψ and Δ of our SE data which is modelled by Fresnel equation. From the extraction using the secant method we obtain the optical constant of the Au bulk sample with n = 0.11 to 0.22 and k = 3.26 to 3.37 which is close to that of using pseudo-dielectric method. We obtain the same result for Cr film with n = 3.66 to 3.81 and k = 5.32 to 5.38 which is close to the result from reference. These results show that our inexpensive home-made Single wavelength Ellipsometry instrument and the extraction method are reliable for determining the optical constant of nanostructured materials.
机译：与RAE廉价的自制单波长椭偏仪（旋转椭偏仪）配置已经研制成功。椭偏光谱（SE）是一种光学测量技术，其是基于所述相位差（A）和P和S之间的振幅比（ψ）的变化的测量线偏振光反射（或透射）光的。我们的RAE配置系统由偏振器，样品，分析仪，检测器，和用作单色光源He-Ne激光（A = 633纳米）的。为了测试我们的SE系统的可靠性，我们测量的Au散装和Cr（30nm厚）膜的光学常数。光学常数和厚度分别通过采用基于正割法，其由菲涅耳方程建模我们的SE数据的ψ和Δ的伪电介质函数和数值反演萃取。从我们使用具有n = 0.11得到在Au本体样品的光学常数，以0.22且k = 3.26到3.37，接近，使用伪电介质方法的割线方法的提取。我们获得用于具有n = 3.66 Cr膜相同的结果，以3.81且k = 5.32到5.38，接近从参考的结果。这些结果表明，我们的廉价的自制单波长椭偏仪和提取方法是可靠的，用于确定纳米结构化材料的光学常数。

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