MECHANICAL DESIGN OF A COMPACT ROTARY FLEXURE STAGE WITH TEN-DEGREE-LEVEL TRAVEL RANGE AND TEN-NANORADIAN-LEVEL POSITIONING RESOLUTION

机译：紧凑型旋转弯曲阶段的机械设计，具有十级级别的行驶范围和十纳米级定位分辨率

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The Advanced Photon Source (APS) at Argonne National Laboratory (ANL) is a national user facility for synchrotron radiation research. To work with upgraded brighter APS x-ray sources and more advanced x-ray optics, scientists at the APS will need more customized novel x-ray instruments. Nanopositioning techniques present a significant opportunity to support the state-of-the-art synchrotron radiation instrumentation research for the APS operations and upgrade project. A compact rotary flexure stage Z4-4101 with Ultra-High Vacuum (UHV) compatibility has been designed and constructed for coherent surface scattering imaging and hard x-ray nanoprobe applications at the APS with ten-degree-level travel range and ten-nanoradian-level positioning resolution.

机译：Argonne国家实验室（ANL）的高级光子源（APS）是一个用于同步辐射研究的国家用户设施。为了使用升级更明亮的APS X射线源和更先进的X射线光学，APS的科学家将需要更多自定义的新颖X射线仪器。纳米定位技术提供了支持APS运营和升级项目的最先进的同步辐射仪表研究的重要机会。具有超高真空（UHV）兼容性的紧凑型旋转挠度级Z4-4101，设计和构造用于具有十个度级行进范围和十纳米岛的APS的相干表面散射成像和硬X射线Nanoprobe应用。水平定位分辨率。

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《ASPE Topical Meeting on Precision Mechatronic System Design and Control》|2019年|130p|共4页
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Deming Shu; Steven Kearney; Jayson Anton; Jorg Maser; Jin Wang;
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机译：具有紧凑型的基于弯曲的旋转微定位阶段
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机译：紧凑型旋转弯曲阶段的机械设计，具有十级级别的行驶范围和十纳米级定位分辨率
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MECHANICAL DESIGN OF A COMPACT ROTARY FLEXURE STAGE WITH TEN-DEGREE-LEVEL TRAVEL RANGE AND TEN-NANORADIAN-LEVEL POSITIONING RESOLUTION

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