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Combined Diamond Disks in Chemical Mechanical Polishing

机译：合并金刚石磁盘在化学机械抛光中

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This paper presents a combined diamond disk that is designed and manufactured to markedly improve the leveling of diamond tips, thereby reducing the amount of diamond grit. First, a small brazed diamond disk was manufactured. Second, 12- or 24-disk brazed diamond disks were mounted onto a substrate with a diameter of 108 mm for completing the combined diamond disk. Four types of disks were fabricated, and their performances were compared with that of a conventional diamond disk. The experimental results showed that the combined diamond disk has more complete diamond crystal shapes and distribution with better leveling, which increases the effectiveness of the working diamond grits. Compared to a conventional diamond disk, the combined diamond disk achieved a higher wafer removal rate and better uniformity while consuming less pad material. The number of diamond grits required was significantly lower.Roughly, 7,600 and 12,000 diamond grits were used for the 24-and 12-disk brazed diamond disks, respectively, in the new disk, whereas 20,000 diamond grits were used in a conventional diamond disk. In the case of the conventional diamond disk, the diamond tips are leveled to more than 50 urn. However, in the case of the combined diamond disk, the diamond tips can be leveled to less than 30 μm because the diamond tips are already leveled. These results contribute to the understanding of conditioning techniques and further improvement of the chemical mechanical polishing process.
机译：本文介绍了一个设计和制造的钻石盘，以显着提高金刚石尖端的平整，从而减少了金刚石砂砾的量。首先，制造了一个小型钎焊钻石盘。将第二，12或24芯钎焊金刚石磁盘安装在基板上，直径为108mm，以完成组合的金刚石盘。制造了四种类型的磁盘，并将其性能与传统金刚石盘的性能进行了比较。实验结果表明，合并的金刚石盘具有更完整的金刚石晶体形状和分布，具有更好的水平，这提高了工作钻石粗砂的有效性。与传统的金刚石盘相比，组合的钻石盘在消耗更少的垫材料时实现了更高的晶片去除速率和更好的均匀性。所需的金刚石灰度的数量显着降低。备用7,600和12,000颗金刚石粗砂，分别用于新磁盘的24和12碟钎焊金刚石磁盘，而在传统的金刚石盘中使用20,000个金刚石砂砾。在传统的钻石盘的情况下，钻石提示升级至50个URN。然而，在组合的金刚石盘的情况下，钻石尖端可以升级至小于30μm，因为钻石提示已经升级。这些结果有助于了解调理技术和进一步改善化学机械抛光过程。

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