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The effect of CNT content on the tribological properties of CNTs doped diamond-like carbon films

机译：CNT含量对CNT掺杂金刚石状碳膜的摩擦学性质的影响

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摘要

Diamond-like carbon (DLC) films is useful in many applications. To improve the tribological properties in DLC, we spin coat the multi-walled carbon nanotubes (CNTs) with different solution on (100) silicon. DLC was deposited by plasma enhanced chemical vapor deposition (PECVD) with C_2H_2 and H_2. The results show that the I_D/I_g ratio is increasing with higher CNTs content while the friction coefficient and critical load are decreasing with larger CNTs contents. The decreasing friction coefficient results from graphitation on the surface due to higher sp~2 content. The decreasing critical load is attributed to higher internal stress. The effect of friction coefficient and CNT concentration on stress distribution is studied by a nanoscratch finite element analysis. The results indicate that low friction coefficient and high CNT concentration will reduce the stress magnitude in the film. Therefore, the decreasing friction coefficient in CNT doped DLC film with increasing CNT concentration should reduce stress in the film and is good for adhesion. The discrepancy between friction coefficient and critical load is explained in terms of high internal stress during deposition. A surface treatment on CNT before deposition to reduce internal stress is currently under investigation.
机译：菱形碳（DLC）薄膜在许多应用中都很有用。为了改善DLC中的摩擦学特性，我们将多壁碳纳米管（CNT）旋转在（100）硅上用不同的溶液涂覆多壁碳纳米管（CNT）。 DLC通过血浆增强的化学气相沉积（PECVD）沉积，C_2H_2和H_2。结果表明，通过较大的CNT内容摩擦系数和临界负载，I_D / I_G比率随着CNTS内容越高而增加。由于SP〜2含量越高，从表面上的绘制降低导致摩擦系数降低。减小的临界负载归因于更高的内部应力。通过纳米克拉有限元分析研究了摩擦系数和CNT浓度对应力分布的影响。结果表明，低摩擦系数和高CNT浓度将降低薄膜中的应力幅度。因此，随着CNT浓度的增加，CNT掺杂DLC膜中的摩擦系数的降低应减少膜中的应力，并且良好地粘附。摩擦系数和临界负荷之间的差异在沉积期间的高内应力方面解释。在沉积前对CNT进行表面处理，以减少内部应力在调查中。

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