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首页> 外文会议>Symposium on microelectromechanical structures for materials research >MECHANICAL AND METALLOGRAPHIC CHARACTERIZATION OF LIGA FABRICATED NICKEL AND 80 Ni-20 Fe PERMALLOY
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MECHANICAL AND METALLOGRAPHIC CHARACTERIZATION OF LIGA FABRICATED NICKEL AND 80 Ni-20 Fe PERMALLOY

机译：LIGA的机械和金相表征制造镍和80％Ni-20％Fe Perfoloy

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摘要

A table top servohydraulic load frame equipped with a laser displacement measurement system was constructed for the mechanical characterization of LIGA fabricated electroforms. A drop-in tensile specimen geometry which includes a pattern to identify gauge length via laser scanning has proven to provide a convenient means to monitor and characterize mechanical property variations arising during processing. In addition to tensile properties, hardness and metallurgical data were obtained for nickel deposit specimens of current density varying between 20 and 80 mA/cm~2 from a sulfamate based bath. Data from 80/20 nickel/iron deposits is also presented for comparison. As expected, substantial mechanical property differences from bulk metal properties are observed as well as a dependence of material strength on current density which is supported by grain size variation. While elastic modulus values of the nickel electrodeposit are near 160 GPa, yield stress values vary by over 60%. A strong orientation in the metal electrodeposits as well as variations in nucleating and growth morphology present a concern for anisotropic and geometry dependent mechanical properties within and between different LIGA components.
机译：构造了配备有激光位移测量系统的桌面伺服液压载荷，用于LIGA制造的电铸件的机械表征。通过激光扫描，包括用于识别规格长度的图案的下降张拉模几何，已经证明提供了一种提供了一种方便的手段，以监测和表征在加工过程中产生的机械性能变化。除了拉伸性能之外，对于电流密度的镍沉积物试样，从氨基甲酸氨基甲酸酯的浴中获得电流密度的镍沉积物标本。还提出了来自80/20镍/铁沉积物的数据进行比较。如所预期的那样，观察到与块状金属性质的大量机械性质差异以及材料强度对电流密度的依赖性，这是由晶粒尺寸变化负载的电流密度。虽然镍电沉积的弹性模量值接近160gPa，但屈服应力值变化超过60％。金属电沉积物中的强烈取向以及成核和生长形态的变化存在对不同LIGA组分之间的各向异性和几何依赖性机械性能的关注。

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