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首页> 外文会议>Microelectromechanical structures for materials research >MECHANICAL AND METALLOGRAPHIC CHARACTERIZATION OF LIGA FABRICATED NICKEL AND 80 Ni-20 Fe PERMALLOY
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MECHANICAL AND METALLOGRAPHIC CHARACTERIZATION OF LIGA FABRICATED NICKEL AND 80 Ni-20 Fe PERMALLOY

机译：锂细晶镍和80％Ni-20％Fe永磁体的力学和金相表征。

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A table top servohydraulic load frame equipped with a laser displacement measurement system was constructed for the mechanical characterization of LIGA fabricated electroforms. A drop-in tensile specimen geometry which includes a pattern to identify gauge length via laser scanning has proven to provide a convenient means to monitor and characterize mechanical property variations arising during processing. In addition to tensile properties, hardness and metallurgical data were obtained for nickel deposit specimens of current density varying between 20 and 80 mA/cm~2 from a sulfamate based bath. Data from 80/20 nickel/iron deposits is also presented for comparison. As expected, substantial mechanical property differences from bulk metal properties are observed as well as a dependence of material strength on current density which is supported by grain size variation. While elastic modulus values of the nickel electrodeposit are near 160 GPa, yield stress values vary by over 60%. A strong orientation in the metal electrodeposits as well as variations in nucleating and growth morphology present a concern for anisotropic and geometry dependent mechanical properties within and between different LIGA components.
机译：构造了配有激光位移测量系统的台式伺服液压负载框架，以对LIGA制成的电铸模进行机械表征。事实证明，插入式拉伸试样几何形状包括通过激光扫描识别标距的图案，可提供一种方便的手段来监视和表征加工过程中产生的机械性能变化。除了抗拉性能，还从氨基磺酸盐基镀液中获得了电流密度在20至80 mA / cm〜2之间变化的镍沉积样品的硬度和冶金数据。还提供了80/20镍/铁矿床的数据以进行比较。如预期的那样，观察到了与块状金属性能的显着机械性能差异，以及材料强度对电流密度的依赖性，电流密度受晶粒尺寸变化的支持。尽管镍电沉积的弹性模量值接近160 GPa，但屈服应力值变化超过60％。金属电沉积中的强取向以及成核和生长形态的变化提出了对不同LIGA组件内部和之间的各向异性和几何相关的机械性能的关注。

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