Heterogenous integration of telecom lasers to Si substrates by micro transfer printing

机译：电信用户通过微型转印印刷对电信用户对SI基材的影响

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Lasers based on In(AlGaAs)P materials emitting in the optical c-band are heterogeneously integrated onto Si substrates by Micro Transfer Printing (μTP). Efficient thermal sinking allows the lasers to operate in continuous wave up to 45°C. The reflectivity at the facets can be optimized by tuning the thickness of the passivation layer. This integration strategy can be particularly relevant for lasers being coupled to polymer or SOI waveguides for advanced photonics integrated circuits.

机译：基于（AlgaAs）P材料通过微传递打印（μTP）在光学C频带中发出的in（Algaas）P材料具有非均匀集成到Si基板上。高效的热沉降允许激光器在连续波中运行，高达45°C。通过调谐钝化层的厚度，可以优化小平面的反射率。这种集成策略可以特别相关地与用于高级光子学集成电路的聚合物或SOI波导耦合的激光器。

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《International Conference and Exhibition on Integration Issues of Miniaturized Systems》|2017年|510p|共7页
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Ruggero Loi; James OCallaghan; Brendan Roycroft; Agnieszka Gocalinska; Enrica Mura; Emanuele Pelucchi; Antonio Jose Trindade; Alin Fecioru; Christopher A. Bower; Brian Corbett;
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1. Heterogenous integration of a thin-film GaAs photodetector and a microfluidic device on a silicon substrate [J] . Fuchuan Song, Jing Xiao, Fidaali Udawala, Journal of Micromechanics and Microengineering . 2011,第3期

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2. Wafer-scale integration of group III-V lasers on silicon using transfer printing of epitaxial layers [J] . Justice J., Bower C., Meitl M., Nature photonics . 2012,第9期

机译：使用外延层的转移印刷在硅上进行III-V族激光器的晶圆级集成
3. Laser lift-off transfer printing of patterned GaN light-emitting diodes from sapphire to flexible substrates using a Cr/Au laser blocking layer [J] . Jaeyi Chun, Youngkyu Hwang, Yong-Seok Choi Scripta materialia . 2014,第Null期

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4. Heterogenous integration of telecom lasers to Si substrates by micro transfer printing [C] . Ruggero Loi, James OCallaghan, Brendan Roycroft, International Conference and Exhibition on Integration Issues of Miniaturized Systems . 2017

机译：电信用户通过微型转印印刷对电信用户对SI基材的影响
5. Towards flexible full-color active matrix organic light-emitting displays: Dry dye printing for OLED integration and 280°C amorphous-silicon thin-film transistors on clear plastic substrates. [D] . Long, Ke. 2006

机译：迈向柔性全色有源矩阵有机发光显示器：用于透明OLED集成的干式染料印刷和在透明塑料基板上的280°C非晶硅薄膜晶体管。
6. Integration of Light Trapping Silver Nanostructures in Hydrogenated Microcrystalline Silicon Solar Cells by Transfer Printing [O] . Hidenori Mizuno, Hitoshi Sai, Koji Matsubara, 2015

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7. 3D laser printing by ultra-short laser pulses for micro-optical applications: towards telecom wavelengths [O] . Ryu, Meguya, Mizeikis, Vygantas, Morikawa, Junko, 2017

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8. Laser Integration on Silicon Photonic Circuits Through Transfer Printing. [R] . Roelkens, G. 2017

机译：通过转移印刷在硅光子电路上激光集成。

Heterogenous integration of telecom lasers to Si substrates by micro transfer printing

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