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Image resolution monitoring technique for CD-SEM

机译：CD-SEM的图像分辨率监控技术

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This report presents a technique for quantifying the differences in resolution between tools from the SEM images at sub-nanometer scales. The accuracy of resolution monitoring of SEM images depends on the image noise factor and the sample shape factor. Therefore, a resolution monitoring method that is less dependent on the noise and the sample shape is highly desirable. In this study, the dependence on random noise and changes in sample shape are evaluated for three existing resolution measurement methods: the contrast-to-gradient (CG), fast Fourier transform (FFT) and auto correlation function (ACF) methods. By analyzing simulated and experimental SEM images, it was found that the CG method was the least dependent on noise and the sample, while the other two methods exhibited larger variations between samples. On the basis of these benchmarking results, the CG method appears to exhibit the best performance out of these existing resolution measurement techniques.
机译：本报告提供了一种用于量化来自子纳米尺度的SEM图像的工具之间分辨率差异的技术。 SEM图像的分辨率监控的准确性取决于图像噪声系数和样品形状因子。因此，非常希望较小地依赖于噪声和样品形状的分辨率监测方法。在本研究中，对三个现有分辨率测量方法评估对随机噪声的依赖性和样本形状的变化：对比度 - 梯度（CG），快速傅里叶变换（FFT）和自动相关功能（ACF）方法。通过分析模拟和实验性SEM图像，发现CG方法最不依赖于噪声和样品，而另外两种方法在样品之间表现出更大的变化。在这些基准测试结果的基础上，CG方法似乎呈现出这些现有分辨率测量技术的最佳性能。

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