Fabrication and Characteristics of Free Standing Shaped Pupil Masks for TPF-Coronagraph

机译：用于TPF - 胰凝血剂的自由静态瞳孔面罩的制造和特征

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Direct imaging and characterization of exo-solar terrestrial planets require coronagraphic instruments capable of suppressing star light to 10~(-10). Pupil shaping masks have been proposed and designed at Princeton University to accomplish such a goal. Based on Princeton designs, free standing (without a substrate) silicon masks have been fabricated with lithographic and deep etching techniques. In this paper, we discuss the fabrication of such masks and present their physical and optical characteristics in relevance to their performance over the visible to near IR bandwidth.

机译：exo-solar陆地行星的直接成像和表征需要能够抑制星光至10〜（-10）的胰血管仪器。在普林斯顿大学提出并设计了瞳孔塑造面具，以实现这样的目标。基于Princeton设计，使用光滑和深蚀刻技术制造了自由静止（没有基板）硅面膜。在本文中，我们讨论了这种掩模的制造，并将其物理和光学特性与其在接近IR带宽附近的可见性上的性能相关。

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《Conference on Space Telescopes and Instrumentation》|2006年||共9页
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Kunjithapatham Balasubramanian; Pierre M. Echternach; Matthew R. Dickie; Richard E. Muller; Victor E. White; Daniel J. Hoppe; Stuart B. Shaklan; Ruslan Belikov; N. Jeremy Kasdin; Robert J. Vanderbei; Daniel Ceperley; Andrew R. Neureuther; SPIE-The International Society for Optical Engineering; American Astronomical Society(AAS)(US); Association of Universities for Research in Astronomy(AURA)(US);
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中图分类天文光学望远镜;
关键词
terrestrial planet finder; coronagraph; shaped pupil mask; DRIE;

机译：陆地行星探测器;昆虫胶囊;Drie;

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专利

1. Comparative Study of Manufacturing Techniques for Coronagraphic Binary Pupil Masks: Masks on Substrates and Free-Standing Masks [J] . Keigo ENYA, Kanae HAZE, Takayuki KOTANI, PASJ: Publications of the Astronomical Society of Japan . 2012,第6期

机译：冠状二元瞳孔掩模制造技术的比较研究：基材上的掩模和自由站立的掩模
2. Fabrication of Electrical Contacts on Pyramid-Shaped NTD-Ge Microcalorimeters Using Free-Standing Shadow Masks [J] . U. Lo Cicero, C. Arnone, M. Barbera, Journal of Low Temperature Physics . 2012,第3a4期

机译：使用自由荫罩在金字塔形NTD-Ge微热量计上制造电触点
3. Free-standing silicon shadow masks for transmon qubit fabrication [J] . I. Tsioutsios, K. Serniak, S. Diamond, AIP Advances . 2020,第6期

机译：用于传输量子位制造的独立硅遮阳面罩
4. Fabrication and Characteristics of Free Standing Shaped Pupil Masks for TPF-Coronagraph [C] . Kunjithapatham Balasubramanian, Pierre M. Echternach, Matthew R. Dickie, Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter pt.2 . 2006

机译：TPF冠状仪的自立式小学生口罩的制作及特性
5. Design and fabrication of free -standing structures as off -chip interconnects for microsystems packaging [D] . Kacker, Karan 2008

机译：独立结构的设计和制造，作为微系统封装的片外互连
6. Fabrication of 2-Inch Free-Standing GaN Substrate on Sapphire With a Combined Buffer Layer by HVPE [O] . Nanliu Liu, Yongjing Jiang, Jian Xiao, 2021

机译：用HVPE使用组合缓冲层在蓝宝石上制造2英寸独立的GaN衬底
7. Comparative study of manufacturing techniques for coronagraphic binary pupil masks: masks on substrates and free-standing masks [O] . Enya, Keigo, Haze, Kanae, Kotani, Takayuki, 2012

机译：冠状二元法制备技术的比较研究瞳孔面罩：基板上的面罩和独立面罩

Fabrication and Characteristics of Free Standing Shaped Pupil Masks for TPF-Coronagraph

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